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Keyword:'210363-27-2'

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precursor for semiconductor applications

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Sigma-Aldrich

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210363-27-2

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751774

Tris(diethylamido)(tert-butylimido)niobium(V)

packaged for use in deposition systems

Synonym(s): (tert)-Butyliminotris(diethylamino)niobium, tris(N-ethylethanaminato)[2-methyl-2-propanaminato(2-)]-niobium, t-Butylimido tris(diethylamido)niobium(V)

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