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Methyltrichlorosilane
Synonym(s):
Trichloro(methyl)silane
Linear Formula:
CH
3
SiCl
3
CAS Number:
75-79-6
Molecular Weight:
149.48
EC Number:
200-902-6
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M85301
Methyltrichlorosilane,
99%
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679208
Methyltrichlorosilane,
deposition grade, ≥98% (GC), ≥99.99% (as metals)
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