Tetrakis(dimethylamido)titanium(IV)

Synonym(s):

TDMAT, Tetrakis(dimethylamino)titanium(IV)

Linear Formula:

[(CH₃)₂N]₄Ti

CAS Number:

Molecular Weight:

224.17

EC Number:

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precursor for semiconductor applications (2)

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Sigma-Aldrich (2)

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Core

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Tetrakis(dimethylamido)titanium(IV), 99.999% trace metals basis

Tetrakis(dimethylamido)titanium(IV), packaged for use in deposition systems