Tris(diethylamido)(tert-butylimido)tantalum(V)

Synonym(s):

Tris(diethylamino)(tert-butylimino)tantalum(V)

Linear Formula:

(CH₃)₃CNTa(N(C₂H₅)₂)₃

CAS Number:

Molecular Weight:

468.46

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Tris(diethylamido)(tert-butylimido)tantalum(V), 99%, ≥99.99% trace metals basis

Tris(diethylamido)(tert-butylimido)tantalum(V), packaged for use in deposition systems