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Merck
CN

205389

Hexamethyldisiloxane

≥98%

Synonym(s):

HMDSO

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About This Item

Linear Formula:
(CH3)3SiOSi(CH3)3
CAS Number:
Molecular Weight:
162.38
UNSPSC Code:
12352103
NACRES:
NA.22
PubChem Substance ID:
EC Number:
203-492-7
Beilstein/REAXYS Number:
1736258
MDL number:
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InChI key

UQEAIHBTYFGYIE-UHFFFAOYSA-N

InChI

1S/C6H18OSi2/c1-8(2,3)7-9(4,5)6/h1-6H3

SMILES string

C[Si](C)(C)O[Si](C)(C)C

vapor density

>1 (vs air)

assay

≥98%

form

liquid

Quality Level

mp

−59 °C (lit.)

density

0.764 g/mL at 20 °C (lit.)

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General description

Hexamethyldisiloxane (HMDSO), a linear polydisiloxane, is an organosilicon reagent commonly utilized as a source for plasma enhanced chemical vapor deposition (PE-CVD) of thin films of silicon compounds. It is also employed as a substitute to silane in silicon integrated circuit technology. Its dissociative ionization by electron impact has been studied by Fourier transform mass spectrometry. Synthesis of plasma-polymerized HMDSO thin films by atmospheric pressure glow (APG) discharge has been reported. Crystals of HMDSO at 148K are monoclinic. Addition of HMDSO to P4S10, improves its efficiency as thionating agent.

Application

Hexamethyldisiloxane can be used:
  • To fabricate a gas diffusion layer (GDL) with controlled hydrophobic silicone nano-layer by the dry deposition process.
  • To prepare silver nanoparticles coated with silica using arginine and glucose as the catalyst and the reducing agent, respectively.

pictograms

FlameEnvironment

signalword

Danger

hcodes

Hazard Classifications

Aquatic Acute 1 - Aquatic Chronic 1 - Flam. Liq. 2

Storage Class

3 - Flammable liquids

wgk

WGK 2

flash_point_f

21.2 °F - closed cup

flash_point_c

-6 °C - closed cup

ppe

Eyeshields, Faceshields, Gloves, type ABEK (EN14387) respirator filter

Regulatory Information

危险化学品
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The crystal and molecular structures of disiloxane (at 108 K) and hexamethyldisiloxane (at 148 K).
Barrow MJ, et al.
Acta Crystallographica Section B, Structural Science, Crystal Engineering and Materials, 35(9), 2093-2099 (1979)
Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane films prepared by atmospheric pressure glow discharge.
Sawada Y, et al.
Journal of Physics D: Applied Physics, 28(8), 1661-1661 (1995)
Ion chemistries in hexamethyldisiloxane.
Jiao CQ, et al.
Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, And Films, 23(5), 1295-1304 (2005)
The Raman Spectra of Hexamethyldisilane and Hexamethyldisiloxane.
Murata H and Kumada M.
J. Chem. Phys. , 21(5), 945-945 (1953)
Tae-Jun Ko et al.
ACS applied materials & interfaces, 7(9), 5506-5513 (2015-02-18)
Reliable operation of a proton exchange membrane fuel cell requires proper water management to prevent water flooding in porous carbon materials such as the gas diffusion layer (GDL). In contrast to the conventional GDL that uses the "wet" dip-coating process

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