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About This Item
Linear Formula:
(CH3)3SiOSi(CH3)3
CAS Number:
Molecular Weight:
162.38
UNSPSC Code:
12352103
NACRES:
NA.22
PubChem Substance ID:
EC Number:
203-492-7
Beilstein/REAXYS Number:
1736258
MDL number:
vapor density
>1 (vs air)
Quality Segment
assay
≥98%
form
liquid
refractive index
n
bp
101 °C
mp
−59 °C (lit.)
density
0.764 g/mL at 20 °C (lit.)
SMILES string
C[Si](C)(C)O[Si](C)(C)C
InChI
1S/C6H18OSi2/c1-8(2,3)7-9(4,5)6/h1-6H3
InChI key
UQEAIHBTYFGYIE-UHFFFAOYSA-N
General description
Hexamethyldisiloxane (HMDSO), a linear polydisiloxane, is an organosilicon reagent commonly utilized as a source for plasma enhanced chemical vapor deposition (PE-CVD) of thin films of silicon compounds. It is also employed as a substitute to silane in silicon integrated circuit technology. Its dissociative ionization by electron impact has been studied by Fourier transform mass spectrometry. Synthesis of plasma-polymerized HMDSO thin films by atmospheric pressure glow (APG) discharge has been reported. Crystals of HMDSO at 148K are monoclinic. Addition of HMDSO to P4S10, improves its efficiency as thionating agent.
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Signal Word
Danger
Hazard Codes
Precautionary Statements
Hazard Classifications
Aquatic Acute 1 - Aquatic Chronic 1 - Flam. Liq. 2
Storage Class
3 - Flammable liquids
WGK
WGK 2
Flash Point (°F)
21.2 °F - closed cup
Flash Point (°C)
-6 °C - closed cup
PPE (personal protective equipment)
Eyeshields, Faceshields, Gloves, type ABEK (EN14387) respirator filter
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