Skip to Content
Merck
CN

Key Documents

View All Documentation

454516

Tetrakis(trimethylsilyloxy)silane

97%

Synonym(s):

1,1,1,5,5,5-Hexamethyl-3,3-bis[(trimethylsilyl)oxy]trisiloxane, Tetrakis(trimethylsilyl) silicate

Sign In to View Organizational & Contract Pricing.

Select a Size

Change View

About This Item

Linear Formula:
[(CH3)3SiO]4Si
CAS Number:
3555-47-3
Molecular Weight:
384.84
NACRES:
NA.22
PubChem Substance ID:
24868927
UNSPSC Code:
12352103
EC Number:
222-613-4
MDL number:
MFCD00051587
Technical Service
Need help? Our team of experienced scientists is here for you.
Let Us Assist

Quality Segment

100

assay

97%

refractive index

n20/D 1.389 (lit.)

bp

103-106 °C/2 mmHg (lit.)

density

0.87 g/mL at 25 °C (lit.)

SMILES string

C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C

InChI

1S/C12H36O4Si5/c1-17(2,3)13-21(14-18(4,5)6,15-19(7,8)9)16-20(10,11)12/h1-12H3

InChI key

VNRWTCZXQWOWIG-UHFFFAOYSA-N

Application

Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method.

pictograms

Exclamation mark
GHS07

signalword

Warning

Hazard Classifications

Eye Irrit. 2 - Skin Irrit. 2 - STOT SE 3

target_organs

Respiratory system

Storage Class

10 - Combustible liquids

wgk

WGK 3

flash_point_f

168.8 °F - closed cup

flash_point_c

76 °C - closed cup

ppe

Eyeshields, Gloves, type ABEK (EN14387) respirator filter

Choose from one of the most recent versions:

Certificates of Analysis (COA)

Lot/Batch Number

Don't see the Right Version?

If you require a particular version, you can look up a specific certificate by the Lot or Batch number.

Search for a COA

Already Own This Product?

Find documentation for the products that you have recently purchased in the Document Library.

Visit the Document Library