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Merck
CN

454516

Tetrakis(trimethylsilyloxy)silane

97%

Synonym(s):

1,1,1,5,5,5-Hexamethyl-3,3-bis[(trimethylsilyl)oxy]trisiloxane, Tetrakis(trimethylsilyl) silicate

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About This Item

Linear Formula:
[(CH3)3SiO]4Si
CAS Number:
3555-47-3
Molecular Weight:
384.84
EC Number:
222-613-4
MDL number:
MFCD00051587
UNSPSC Code:
12352103
PubChem Substance ID:
24868927
NACRES:
NA.22

Key Documents

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Quality Level

100

Assay

97%

refractive index

n20/D 1.389 (lit.)

bp

103-106 °C/2 mmHg (lit.)

density

0.87 g/mL at 25 °C (lit.)

SMILES string

C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C

InChI

1S/C12H36O4Si5/c1-17(2,3)13-21(14-18(4,5)6,15-19(7,8)9)16-20(10,11)12/h1-12H3

InChI key

VNRWTCZXQWOWIG-UHFFFAOYSA-N

Related Categories

Application

Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method.

Pictograms

Exclamation mark
GHS07

Signal Word

Warning

Hazard Statements

H315,H319,H335

Hazard Classifications

Eye Irrit. 2 - Skin Irrit. 2 - STOT SE 3

Target Organs

Respiratory system

Storage Class Code

10 - Combustible liquids

WGK

WGK 3

Flash Point(F)

168.8 °F - closed cup

Flash Point(C)

76 °C - closed cup

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

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Certificates of Analysis (COA)

Lot/Batch Number
MKCZ6067
MKCX9541
MKCV8769
MKCR8798
MKCP2183

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Tetrakis (trimethylsilyloxy) silane for nanostructured SiO2-like films deposited by PECVD at atmospheric pressure
Schafer, J, et al.
Surface and Coatings Technology, 295, 112-118 (2016)
Characteristics of Plasma Polymerized Low-dielectric Constant SiCOH Films Deposited with Tetrakis (trimethylsilyloxy) silane and Cyclohexane Precursors
Kim H, et al.
Bulletin of the Korean Chemical Society,, 35(10), 2941-2944 (2014)
Zichun Huang et al.
Water research, 185, 116224-116224 (2020-08-08)
Based on wastewater and raw/digested sludge samples from 29 wastewater treatment plants in 25 Chinese cities, the nationwide profiles of cis- and trans- isomers of phenylmethylsiloxanes (P3 and P4) and trifluoropropylmethylsiloxanes (D3F and D4F) were investigated. Calculated with paired influents/sludges
Liqin Zhi et al.
Journal of environmental sciences (China), 76, 199-207 (2018-12-12)
Methylsiloxanes are a class of silicone compounds that have been widely used in various industrial processes and personal care products for several decades. This study investigated the spatial distribution of three cyclic methylsiloxanes (D4-D6) and twelve linear methylsiloxanes (L5-L16) in
Liqin Zhi et al.
Environmental science & technology (2018-10-20)
Fluorinated methylsiloxanes are modified methylsiloxanes and include tris(trifluoropropyl)trimethylcyclotrisiloxane (D3F) and tetrakis(trifluoropropyl)tetramethylcyclotetrasiloxane (D4F). Here, we report fluorinated methylsiloxanes (D3F and D4F) in surface water and sediment samples collected near a fluorinated methylsiloxane manufacturing plant in Weihai, China. The concentrations of D3F
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