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Merck
CN

463019

Silicon tetrafluoride

electronic grade, ≥99.99%

Synonym(s):

Silicon(IV) fluoride

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About This Item

Linear Formula:
SiF4
CAS Number:
7783-61-1
Molecular Weight:
104.08
NACRES:
NA.23
PubChem Substance ID:
24869885
UNSPSC Code:
12352300
EC Number:
232-015-5
MDL number:
MFCD00040533

Key Documents

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Quality Level

100

InChI key

ABTOQLMXBSRXSM-UHFFFAOYSA-N

InChI

1S/F4Si/c1-5(2,3)4

SMILES string

F[Si](F)(F)F

grade

electronic grade

assay

≥99.99%

form

liquid

reaction suitability

core: silicon

impurities

<0.5 ppm Carbon monoxide (CO), <1 ppm Argon + oxygen (Ar + O2), <1 ppm Carbon dioxide (CO2), <10 ppm Methane (CH4), <3 ppm Nitrogen (N2), <50 ppm Hydrogen fluoride (HF)

bp

−86 °C (lit.)

mp

−90 °C (lit.)

transition temp

critical temperature −14.2 °C

density

3.57 g/mL at 25 °C (lit.)

Application

Silicon tetrafluoride is used in ion-implantation processes and as a precursor to fluorinated silica via plasma-assisted CVD. Mixtures of SiF4-SiH4-H2 have recently been used to deposit polycrystalline silicon thin films via remote plasma chemical vapor deposition (RPCVD). Such fluorinated thin films show visible photoluminescence (PL) at room temperature.

Packaging

Supplied in a carbon steel lecture bottle with a CGA180M/CGA110F needle valve installed.

Compatible with the following:
  • Aldrich® lecture-bottle station systems
  • Aldrich® lecture-bottle gas regulators

Other Notes

See Technical Information Bulletin AL-151 Gas Regulators: Selection, Installation, and Operation

Legal Information

Aldrich is a registered trademark of Sigma-Aldrich Co. LLC

signalword

Danger

Hazard Classifications

Acute Tox. 2 Inhalation - Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1A

supp_hazards

EUH014,EUH029

Storage Class

2A - Gases

wgk

WGK 3

flash_point_f

Not applicable

flash_point_c

Not applicable

ppe

Faceshields, Gloves, Goggles

Regulatory Information

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Certificates of Analysis (COA)

Lot/Batch Number
MKCG7219
MKBW6367V
02848KH
05651DE
09974HD

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Cicala, G.
Journal of Applied Physiology, 80, 6564-6564 (1996)
[Experimental study of toxic properties of silicon tetrafluoride].
G I Rumiantsev et al.
Gigiena i sanitariia, (5)(5), 31-33 (1991-05-01)
Diffusion and Defect Data, Solid State Data, Part B, 51-52, 149-149 (1996)
Journal of the Electrochemical Society, 143, 2640-2640 (1996)
Kathryn George et al.
Dalton transactions (Cambridge, England : 2003), 40(7), 1584-1593 (2011-01-18)
The hypervalent adducts of SiF(4), trans-[SiF(4)(R(3)PO)(2)] (R = Me, Et or Ph), cis-[SiF(4){R(2)P(O)CH(2)P(O)R(2)}] (R = Me or Ph), cis-[SiF(4)(pyNO)(2)] and trans-[SiF(4)(DMSO)(2)] have been prepared from SiF(4) and the ligands in anhydrous CH(2)Cl(2), and characterised by microanalysis, IR and VT multinuclear
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