463019
Silicon tetrafluoride
electronic grade, ≥99.99%
Synonym(s):
Silicon(IV) fluoride
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About This Item
Linear Formula:
SiF4
CAS Number:
Molecular Weight:
104.08
NACRES:
NA.23
PubChem Substance ID:
UNSPSC Code:
12352300
EC Number:
232-015-5
MDL number:
Quality Level
grade
electronic grade
assay
≥99.99%
form
liquid
reaction suitability
core: silicon
impurities
<0.5 ppm Carbon monoxide (CO), <1 ppm Argon + oxygen (Ar + O2), <1 ppm Carbon dioxide (CO2), <10 ppm Methane (CH4), <3 ppm Nitrogen (N2), <50 ppm Hydrogen fluoride (HF)
bp
−86 °C (lit.)
mp
−90 °C (lit.)
transition temp
critical temperature −14.2 °C
density
3.57 g/mL at 25 °C (lit.)
SMILES string
F[Si](F)(F)F
InChI
1S/F4Si/c1-5(2,3)4
InChI key
ABTOQLMXBSRXSM-UHFFFAOYSA-N
Application
Silicon tetrafluoride is used in ion-implantation processes and as a precursor to fluorinated silica via plasma-assisted CVD. Mixtures of SiF4-SiH4-H2 have recently been used to deposit polycrystalline silicon thin films via remote plasma chemical vapor deposition (RPCVD). Such fluorinated thin films show visible photoluminescence (PL) at room temperature.
Packaging
Supplied in a carbon steel lecture bottle with a CGA180M/CGA110F needle valve installed.
Compatible with the following:
Compatible with the following:
- Aldrich® lecture-bottle station systems
- Aldrich® lecture-bottle gas regulators
Other Notes
See Technical Information Bulletin AL-151 Gas Regulators: Selection, Installation, and Operation
Legal Information
Aldrich is a registered trademark of Sigma-Aldrich Co. LLC
signalword
Danger
hcodes
Hazard Classifications
Acute Tox. 2 Inhalation - Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1A
supp_hazards
Storage Class
2A - Gases
wgk
WGK 3
flash_point_f
Not applicable
flash_point_c
Not applicable
ppe
Faceshields, Gloves, Goggles
Regulatory Information
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[Experimental study of toxic properties of silicon tetrafluoride].
G I Rumiantsev et al.
Gigiena i sanitariia, (5)(5), 31-33 (1991-05-01)
Cicala, G.
Journal of Applied Physiology, 80, 6564-6564 (1996)
Diffusion and Defect Data, Solid State Data, Part B, 51-52, 149-149 (1996)