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Merck
CN

463019

Sigma-Aldrich

Silicon tetrafluoride

electronic grade, ≥99.99%

Synonym(s):

Silicon(IV) fluoride

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About This Item

Linear Formula:
SiF4
CAS Number:
Molecular Weight:
104.08
EC Number:
MDL number:
UNSPSC Code:
12352300
PubChem Substance ID:
NACRES:
NA.23
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grade

electronic grade

Quality Level

Assay

≥99.99%

form

liquid

reaction suitability

core: silicon

impurities

<0.5 ppm Carbon monoxide (CO)
<1 ppm Argon + oxygen (Ar + O2)
<1 ppm Carbon dioxide (CO2)
<10 ppm Methane (CH4)
<3 ppm Nitrogen (N2)
<50 ppm Hydrogen fluoride (HF)

bp

−86 °C (lit.)

mp

−90 °C (lit.)

transition temp

critical temperature −14.2 °C

density

3.57 g/mL at 25 °C (lit.)

SMILES string

F[Si](F)(F)F

InChI

1S/F4Si/c1-5(2,3)4

InChI key

ABTOQLMXBSRXSM-UHFFFAOYSA-N

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Application

Silicon tetrafluoride is used in ion-implantation processes and as a precursor to fluorinated silica via plasma-assisted CVD. Mixtures of SiF4-SiH4-H2 have recently been used to deposit polycrystalline silicon thin films via remote plasma chemical vapor deposition (RPCVD). Such fluorinated thin films show visible photoluminescence (PL) at room temperature.

Packaging

Supplied in a carbon steel lecture bottle with a CGA180M/CGA110F needle valve installed.

Compatible with the following:
  • Aldrich® lecture-bottle station systems
  • Aldrich® lecture-bottle gas regulators

Other Notes

Legal Information

Aldrich is a registered trademark of Sigma-Aldrich Co. LLC

Signal Word

Danger

Hazard Statements

Hazard Classifications

Acute Tox. 2 Inhalation - Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1A

Supplementary Hazards

Storage Class Code

2A - Gases

WGK

WGK 3

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

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