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Merck
CN

463094

Trimethylboron

electronic grade, ≥98.35%

Synonym(s):

Trimethylborane

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About This Item

Linear Formula:
B(CH3)3
CAS Number:
593-90-8
Molecular Weight:
55.91
UNSPSC Code:
12352300
PubChem Substance ID:
24869894
EC Number:
209-816-3
MDL number:
MFCD00058727

Key Documents

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InChI key

WXRGABKACDFXMG-UHFFFAOYSA-N

InChI

1S/C3H9B/c1-4(2)3/h1-3H3

SMILES string

CB(C)C

grade

electronic grade

assay

≥98.35%

form

gas

reaction suitability

core: boron

impurities

<1 ppm Oxygen (O2), <1.5% Dimethylethylborane [B(CH3)2C2H5], <10 ppm Carbon dioxide (CO2), <10 ppm Nitrogen (N2), <100 ppm Methane (CH4), <1000 ppm Trimethylamine (TMA), <50 ppm Hydrogen (H2)

bp

−20.2 °C (lit.)

mp

−161.5 °C (lit.)

Application

Precursor to boron carbide thin films by chemical vapor deposition (CVD).
Trimethylboron is used as an organometallic precursor for the CVD of boron-carbon containing films and as a boron source in the deposition of borophosphosilicate glass (BPSG).

Other Notes

Stainless steel regulators Z527416 or Z527424 are recommended.

pictograms

Gas cylinderCorrosion
GHS04,GHS05

signalword

Danger

hcodes

H280,H314

Hazard Classifications

Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1B

Storage Class

2A - Gases

wgk

WGK 1

flash_point_f

Not applicable

flash_point_c

Not applicable

ppe

Faceshields, Gloves, Goggles, multi-purpose combination respirator cartridge (US)

Regulatory Information

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Certificates of Analysis (COA)

Lot/Batch Number
14469HB
14369HB
10813TQ
10713TQ
08713TQ

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