463094
Trimethylboron
electronic grade, ≥98.35%
Synonym(s):
Trimethylborane
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About This Item
Linear Formula:
B(CH3)3
CAS Number:
Molecular Weight:
55.91
UNSPSC Code:
12352300
PubChem Substance ID:
EC Number:
209-816-3
MDL number:
eCl@ss:
32150313
grade
electronic grade
assay
≥98.35%
form
gas
reaction suitability
core: boron
impurities
<1 ppm Oxygen (O2), <1.5% Dimethylethylborane [B(CH3)2C2H5], <10 ppm Carbon dioxide (CO2), <10 ppm Nitrogen (N2), <100 ppm Methane (CH4), <1000 ppm Trimethylamine (TMA), <50 ppm Hydrogen (H2)
bp
−20.2 °C (lit.)
mp
−161.5 °C (lit.)
SMILES string
CB(C)C
InChI
1S/C3H9B/c1-4(2)3/h1-3H3
InChI key
WXRGABKACDFXMG-UHFFFAOYSA-N
Application
Precursor to boron carbide thin films by chemical vapor deposition (CVD).
Trimethylboron is used as an organometallic precursor for the CVD of boron-carbon containing films and as a boron source in the deposition of borophosphosilicate glass (BPSG).
Other Notes
Stainless steel regulators Z527416 or Z527424 are recommended.
Signal Word
Danger
Hazard Codes
Precautionary Statements
Hazard Classifications
Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1B
Storage Class
2A - Gases
WGK
WGK 1
Flash Point (°F)
Not applicable
Flash Point (°C)
Not applicable
PPE (personal protective equipment)
Faceshields, Gloves, Goggles, multi-purpose combination respirator cartridge (US)
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