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Merck
CN

469866

Tetrakis(diethylamido)titanium(IV)

99.999% trace metals basis

Synonym(s):

TDEAT, Tetrakis(diethylamino)titanium(IV), Titanium(IV) tetrakis(diethylamide)

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About This Item

Linear Formula:
[(C2H5)2N]4Ti
CAS Number:
Molecular Weight:
336.38
UNSPSC Code:
12352103
NACRES:
NA.23
PubChem Substance ID:
MDL number:
Beilstein/REAXYS Number:
3621431
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Product Name

Tetrakis(diethylamido)titanium(IV), 99.999% trace metals basis

InChI

1S/4C4H10N.Ti/c4*1-3-5-4-2;/h4*3-4H2,1-2H3;/q4*-1;+4

SMILES string

CCN(CC)[Ti](N(CC)CC)(N(CC)CC)N(CC)CC

InChI key

VJDVOZLYDLHLSM-UHFFFAOYSA-N

assay

99.999% trace metals basis

form

liquid

reaction suitability

core: titanium
reagent type: catalyst

refractive index

n20/D 1.536 (lit.)

bp

112 °C/0.1 mmHg (lit.)

density

0.931 g/mL at 25 °C (lit.)

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Application

Precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD).

General description

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pictograms

FlameCorrosion

signalword

Danger

Hazard Classifications

Flam. Liq. 2 - Skin Corr. 1B - Water-react 1

Storage Class

4.3 - Hazardous materials which set free flammable gases upon contact with water

wgk

WGK 3

flash_point_f

-19.8 °F - closed cup

flash_point_c

-28.8 °C - closed cup

ppe

Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter

Regulatory Information

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Certificates of Analysis (COA)

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Thin Solid Films, 85, 2471-2471 (1994)

Articles

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Titanium dioxide applications: Semiconducting material characteristics and diverse functionalities.

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