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Merck
CN

570133

Tris(dimethylamino)silane

electronic grade, 99.999%

Synonym(s):

(Me2N)3SiH, N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine, TDMAS, Tris(dimethylamido)silane

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About This Item

Linear Formula:
((CH3)2N)3SiH
CAS Number:
Molecular Weight:
161.32
NACRES:
NA.22
PubChem Substance ID:
UNSPSC Code:
12352300
EC Number:
239-165-0
MDL number:
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Product Name

Tris(dimethylamino)silane, electronic grade, 99.999%

InChI key

TWVSWDVJBJKDAA-UHFFFAOYSA-N

InChI

1S/C6H19N3Si/c1-7(2)10(8(3)4)9(5)6/h10H,1-6H3

SMILES string

CN(C)[SiH](N(C)C)N(C)C

grade

electronic grade

description

570133

assay

99.999%

reaction suitability

reagent type: reductant

bp

142 °C (lit.)

mp

−90 °C (lit.)

density

0.838 g/mL at 25 °C (lit.)

functional group

amine

Quality Level

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General description

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signalword

Danger

Hazard Classifications

Acute Tox. 3 Dermal - Acute Tox. 3 Inhalation - Acute Tox. 4 Oral - Eye Dam. 1 - Flam. Liq. 2 - Skin Corr. 1B - Water-react 2

supp_hazards

Storage Class

4.3 - Hazardous materials which set free flammable gases upon contact with water

wgk

WGK 3

flash_point_f

16.0 - 32.0 °F - closed cup

flash_point_c

-8.89 - 0.00 °C - closed cup

ppe

Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter

Regulatory Information

非剧毒-急性毒性1
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B Ballantyne et al.
Toxicology and industrial health, 5(1), 45-54 (1989-01-01)
The acute handling hazards of tris(dimethylamino)silane [TDMAS] were investigated. The acute male rat peroral LD50 (with 95% confidence limits) was 0.71 (0.51-0.97) ml/kg, and the acute male rabbit percutaneous LD50 was 0.57 (0.35-0.92) ml/kg. The liquid was severely irritating to

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