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Merck
CN

759554

Sigma-Aldrich

Zirconium(IV) tert-butoxide

packaged for use in deposition systems

Synonym(s):

Tetra-tert-butoxyzirconium, Tetra-tert-butyl zirconate, ZTB, Zirconium tert-butanolate

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About This Item

Linear Formula:
Zr[OC(CH3)3]4
CAS Number:
Molecular Weight:
383.68
Beilstein:
3681870
MDL number:
UNSPSC Code:
12352103
PubChem Substance ID:
NACRES:
NA.23
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form

liquid

reaction suitability

core: zirconium

refractive index

n20/D 1.424 (lit.)

bp

81 °C/3 mmHg (lit.)

density

0.985 g/mL at 25 °C (lit.)

SMILES string

CC(C)(C)O[Zr](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C

InChI

1S/4C4H9O.Zr/c4*1-4(2,3)5;/h4*1-3H3;/q4*-1;+4

InChI key

BGGIUGXMWNKMCP-UHFFFAOYSA-N

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Application

Zirconium tert-butoxide (ZTB) precursor is used to deposit thin films of Zirconia and other zirconium containing films by atomic layer deposition and chemical vapor deposition methods. Zirconium oxide thin films can also be grown at low temperatures, ranging from 150°C to 300°C, by the presence of moisture along with ZTB or by UV-enhanced atomic layer deposition (UV-ALD) process.

Pictograms

Exclamation mark

Signal Word

Warning

Hazard Statements

Hazard Classifications

Eye Irrit. 2 - Skin Irrit. 2 - STOT SE 3

Target Organs

Respiratory system

Storage Class Code

10 - Combustible liquids

WGK

WGK 3

Flash Point(F)

183.2 °F - closed cup

Flash Point(C)

84 °C - closed cup

Regulatory Information

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Certificates of Analysis (COA)

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  1. Which document(s) contains shelf-life or expiration date information for a given product?

    If available for a given product, the recommended re-test date or the expiration date can be found on the Certificate of Analysis.

  2. How do I get lot-specific information or a Certificate of Analysis?

    The lot specific COA document can be found by entering the lot number above under the "Documents" section.

  3. How do I find price and availability?

    There are several ways to find pricing and availability for our products. Once you log onto our website, you will find the price and availability displayed on the product detail page. You can contact any of our Customer Sales and Service offices to receive a quote.  USA customers:  1-800-325-3010 or view local office numbers.

  4. What is the Department of Transportation shipping information for this product?

    Transportation information can be found in Section 14 of the product's (M)SDS.To access the shipping information for this material, use the link on the product detail page for the product. 

  5. Can the empty deposition cylinders be refilled?

    Yes, we are able to refill these cylinders through our SAFC Hitech group.  Please contact our Technical Service department by email at techserv@sial.com, and they will forward you to the appropriate SAFC Hitech representative for a quote.

  6. My question is not addressed here, how can I contact Technical Service for assistance?

    Ask a Scientist here.

Lee, B. H.; et al.
Thin Solid Films, 518, 6432-6432 (2010)
Shin, H.; et al.
Advanced Materials, 16, 1197-1197 (2004)

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