901482
Hexamethyldisilazane
20% solution in xylene
Synonym(s):
HMDS
Product Name
Hexamethyldisilazane, 20% solution in xylene
InChI
1S/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3
InChI key
FFUAGWLWBBFQJT-UHFFFAOYSA-N
form
liquid
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Application
HMDS preparations are generally applied to the silicon wafer while spinning, prior to the application of photoresist. As an alternative procedure, the wafers may be immersed in HMDS preparations and allowed to dry after removal.
Features and Benefits
- Ready-to-use preparations for surface treatment of silicon.
- Promotes photoresist adhesion on silicon and SiO2 films.
- Prevents lift-off at edges of photoresist and reduces undercutting.
- Ensures full-line resolution.
- Improves yields of MOS and integrated silicon devices.
General description
The product is used to augment the adhesion of photoresist on silicon and SiO2 surfaces.
The effectiveness of HMDS on adhesion is correlated with the reactivity of this compound with surface hydroxyl groups to form a new siloxane end product, i.e. Si-O-Si(CH3)3. This newly formed termination on the substrate renders the surface more hydrophobic in character and leads to greater wettability by photoresist. The latter condition is a crucial factor in good bonding. As a result of these altered characteristics due to the surface chemistry, the treated silicon surfaces become highly compatible with both negative and positive photoresists.
The effectiveness of HMDS on adhesion is correlated with the reactivity of this compound with surface hydroxyl groups to form a new siloxane end product, i.e. Si-O-Si(CH3)3. This newly formed termination on the substrate renders the surface more hydrophobic in character and leads to greater wettability by photoresist. The latter condition is a crucial factor in good bonding. As a result of these altered characteristics due to the surface chemistry, the treated silicon surfaces become highly compatible with both negative and positive photoresists.
signalword
Danger
Hazard Classifications
Acute Tox. 3 Dermal - Acute Tox. 4 Inhalation - Aquatic Chronic 3 - Asp. Tox. 1 - Eye Irrit. 2 - Flam. Liq. 3 - Skin Irrit. 2 - STOT RE 2 - STOT SE 3
target_organs
hearing organs, Respiratory system
Storage Class
3 - Flammable liquids
wgk
WGK 2
flash_point_f
76.1 °F
flash_point_c
24.5 °C
Regulatory Information
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