Quality Segment
assay
99%
form
liquid
refractive index
n20/D 1.391 (lit.)
bp
56 °C (lit.)
density
0.681 g/mL at 25 °C (lit.)
SMILES string
CC[SiH2]CC
InChI
1S/C4H12Si/c1-3-5-4-2/h3-5H2,1-2H3
InChI key
UCXUKTLCVSGCNR-UHFFFAOYSA-N
Application
用于微电子学所用 SiO2 的化学气相沉积的试剂。
