760404
乙醇钽(V)
packaged for use in deposition systems
别名:
PET, Pentaethoxytantalum, Pentaethyl tantalate, Tantalum pentaethoxide
表单
liquid
折射率
n20/D 1.487 (lit.)
沸点
155 °C/0.01 mmHg (lit.)
mp
21 °C (lit.)
密度
1.566 g/mL at 25 °C (lit.)
SMILES字符串
CCO[Ta](OCC)(OCC)(OCC)OCC
InChI
1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5
InChI key
HSXKFDGTKKAEHL-UHFFFAOYSA-N
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应用
Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods
警示用语：
Warning
危险声明
危险分类
Flam. Liq. 3
储存分类代码
3 - Flammable liquids
WGK
WGK 1
闪点(°F)
84.2 °F - closed cup
闪点(°C)
29 °C - closed cup
法规信息
新产品
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