A compact, tabletop plasma cleaner with a redesigned hinged door and viewing window, active fan cooling and improved metering valve, suitable for nanoscale surface cleaning and activation of small samples. Plasma treatment may be applied to a wide variety of materials, including glass, semiconductors, polymers, and metals. Useful applications include surface cleaning of substrates for enhanced adhesion, plasma activation for microfluidic device fabrication, and surface chemistry modification of biomaterials and polymers.

• Compact, tabletop unit
• Adjustable RF power (Low, Medium, High power settings); Maximum 18W
• 3 in. diameter x 6.5 in length Pyrex chamber (optional quartz chamber)
• Hinged door with viewing window
• Active fan cooling
• 1/8" NPT metering valve to qualitatively control gas flow and chamber pressure
• 1/8" NPT 3-way valve to quickly switch from introducing gas, venting, and isolating the chamber
• Requires a separate vacuum pump to run the plasma process.