669008
Tetrakis(dimethylamido)titanium(IV)
packaged for use in deposition systems
Synonym(s):
TDMAT, Tetrakis(dimethylamino)titanium(IV)
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About This Item
Linear Formula:
[(CH3)2N]4Ti
CAS Number:
Molecular Weight:
224.17
NACRES:
NA.23
PubChem Substance ID:
UNSPSC Code:
12352103
EC Number:
221-904-3
MDL number:
Quality Segment
assay
99.999% (trace metals analysis)
form
liquid
reaction suitability
core: titanium
bp
50 °C/0.5 mmHg (lit.)
density
0.947 g/mL at 25 °C (lit.)
SMILES string
CN(C)[Ti](N(C)C)(N(C)C)N(C)C
InChI
1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
InChI key
MNWRORMXBIWXCI-UHFFFAOYSA-N
General description
Atomic number of base material: 22 Titanium
Application
The product is a precursor for the deposition of titanium dioxide thin films by atomic layer deposition with water. Tetrakis(dimethylamido)titanium(IV) (TDMAT) undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).
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signalword
Danger
hcodes
Hazard Classifications
Flam. Liq. 2 - Skin Corr. 1B - Water-react. 1
supp_hazards
Storage Class
4.3 - Hazardous materials which set free flammable gases upon contact with water
flash_point_f
-22.0 °F - closed cup
flash_point_c
-30 °C - closed cup
ppe
Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter
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