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Merck
CN

289388

四氯化硅

99.998% trace metals basis

别名:

STC, 四氯硅烷

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关于此项目

线性分子式:
SiCl4
化学文摘社编号:
分子量:
169.90
NACRES:
NA.23
PubChem Substance ID:
UNSPSC Code:
12352103
EC Number:
233-054-0
MDL number:
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vapor density

5.86 (vs air)

Quality Segment

vapor pressure

420 mmHg ( 37.7 °C)

product line

CVD & ALD Precursors

assay

99.998% trace metals basis

form

liquid

reaction suitability

core: silicon

bp

57.6 °C (lit.)

mp

−70 °C (lit.)

density

1.483 g/mL at 25 °C (lit.)

SMILES string

Cl[Si](Cl)(Cl)Cl

InChI

1S/Cl4Si/c1-5(2,3)4

InChI key

FDNAPBUWERUEDA-UHFFFAOYSA-N

General description

Silicon tetrachloride is a highly reactive and volatile inorganic compound widely utilized as a precursor in both solution-based and vapor-phase deposition processes. It plays a critical role in the synthesis of high-purity silicon-based materials such as silicon dioxide (SiO2) and silicon nitride (Si₃N₄), which are essential in a broad range of high-performance applications such as semiconductor industry, optics and photonics. Additionally, it is also used in the manufacture of high-purity silica glass, advanced ceramics, and energy storage components.

Application

半导体级

Features and Benefits

Silicon tetrachloride exhibits:
  • High Purity (99.998%): Ensures minimal contamination, crucial for optics and photonics applications
  • Ideal for Semiconductor applications: Its ultra-high purity supports fabrication of advanced integrated circuits, wafers, and solar cells


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象形图

Skull and crossbonesCorrosion

警示词

Danger

Hazard Classifications

Acute Tox. 3 Inhalation - Acute Tox. 3 Oral - Eye Dam. 1 - Skin Corr. 1A - STOT SE 3

靶器官

Respiratory system

supp_hazards

存储类别

6.1C - Combustible acute toxic Cat.3 / toxic compounds or compounds which causing chronic effects

WGK

WGK 1

闪点 (F)

Not applicable

闪点 (°C)

Not applicable

PPE(个人防护设备)

Faceshields, Gloves, Goggles



历史批次信息供参考:

分析证书(COA)

Lot/Batch Number

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