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Merck
CN

289388

四氯化硅

99.998% trace metals basis

别名:

STC, 四氯硅烷

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关于此项目

线性分子式:
SiCl4
化学文摘社编号:
10026-04-7
分子量:
169.90
NACRES:
NA.23
PubChem Substance ID:
24857194
UNSPSC Code:
12352103
EC Number:
233-054-0
MDL number:
MFCD00011229

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产品名称

四氯化硅, 99.998% trace metals basis

InChI key

FDNAPBUWERUEDA-UHFFFAOYSA-N

InChI

1S/Cl4Si/c1-5(2,3)4

SMILES string

Cl[Si](Cl)(Cl)Cl

vapor density

5.86 (vs air)

vapor pressure

420 mmHg ( 37.7 °C)

assay

99.998% trace metals basis

form

liquid

reaction suitability

core: silicon

bp

57.6 °C (lit.)

mp

−70 °C (lit.)

density

1.483 g/mL at 25 °C (lit.)

Quality Level

200

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相关类别

Application

半导体级

Features and Benefits

Silicon tetrachloride exhibits:
  • High Purity (99.998%): Ensures minimal contamination, crucial for optics and photonics applications
  • Ideal for Semiconductor applications: Its ultra-high purity supports fabrication of advanced integrated circuits, wafers, and solar cells

General description

Silicon tetrachloride is a highly reactive and volatile inorganic compound widely utilized as a precursor in both solution-based and vapor-phase deposition processes. It plays a critical role in the synthesis of high-purity silicon-based materials such as silicon dioxide (SiO2) and silicon nitride (Si₃N₄), which are essential in a broad range of high-performance applications such as semiconductor industry, optics and photonics. Additionally, it is also used in the manufacture of high-purity silica glass, advanced ceramics, and energy storage components.

pictograms

Skull and crossbonesCorrosion
GHS06,GHS05

signalword

Danger

Hazard Classifications

Acute Tox. 3 Inhalation - Acute Tox. 3 Oral - Eye Dam. 1 - Skin Corr. 1A - STOT SE 3

target_organs

Respiratory system

supp_hazards

EUH014,EUH071

存储类别

6.1C - Combustible acute toxic Cat.3 / toxic compounds or compounds which causing chronic effects

wgk

WGK 1

flash_point_f

Not applicable

flash_point_c

Not applicable

ppe

Faceshields, Gloves, Goggles

法规信息

危险化学品
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历史批次信息供参考:

分析证书(COA)

Lot/Batch Number
SHBK4428
SHBJ0715
SHBH0583V
SHBF2521V
SHBG2090V

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High-performance silicon/graphite anode prepared by CVD using SiCl4 as precursor for Li-ion batteries
Hu, Mengfei and Wu, Houzheng and Zhang, Guo-Jun
Chemical Physics Letters, 833, 140917-140917 (2023)
An efficient and closed-loop approach to convert silicon tetrachloride to silicon nanospheres anode materials via hydrogen thermal plasma
Yang, Zongxian and Dong,et al.
Materials Research Bulletin, 175, 112765-112765 (2024)
D Khushalani et al.
Journal of nanoscience and nanotechnology, 1(2), 129-132 (2003-08-14)
Mesostructured silica-nanoparticle monolithic composites have been synthesized by dispersing prefabricated nanoparticles of gold or zeolite (silicalite) in ethanolic reaction mixtures containing SiCl4 and a Pluronic triblock copolymer template. Whereas silicalite nanoparticles were used directly, surface functionalization of the gold nanoparticles
Lifeng Wu et al.
Journal of hazardous materials, 173(1-3), 305-309 (2009-09-15)
A new method for destroying silicon tetrachloride has been proposed, which is based on a microwave plasma jet that operates at atmospheric pressure using hydrogen as work gas. The influence of input power (P) and silicon tetrachloride concentration (phi) on
R A Promisloff et al.
Chest, 98(4), 928-929 (1990-10-01)
The reactive airway dysfunction syndrome (RADS) is a recently described syndrome in which bronchial hyperreactivity and asthmatic symptoms develop in previously healthy individuals after a single large exposure to an irritating gas, fume, or vapor. We report a cluster of
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