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三（二甲氨基）硅烷

Name: 三（二甲氨基）硅烷
Brand: ALDRICH

packaged for use in deposition systems

别名:

三（二甲氨基）硅烷, (Me₂N)₃SiH, N,N,N′,N′,N′′, N′′-六甲基硅烷三胺, 三（二甲基氨基）硅烷, N,N,N′,N′,N′′′,N′′′-六甲基硅烷三胺, TDMA

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关于此项目

线性分子式:

((CH₃)₂N)₃SiH

化学文摘社编号:

15112-89-7

分子量:

161.32

NACRES:

NA.23

PubChem Substance ID:

329766793

UNSPSC Code:

12352103

EC Number:

239-165-0

MDL number:

MFCD00048006

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属性

Quality Level

100

assay

≥99.9% (GC)

form

liquid

bp

142 °C (lit.)

mp

−90 °C (lit.)

density

0.838 g/mL at 25 °C (lit.)

SMILES string

CN(C)[SiH](N(C)C)N(C)C

InChI

1S/C6H19N3Si/c1-7(2)10(8(3)4)9(5)6/h10H,1-6H3

InChI key

TWVSWDVJBJKDAA-UHFFFAOYSA-N

说明

General description

三(二甲氨基)硅烷是一种具有高挥发性和热稳定性的有机硅化合物，广泛用作气相沉积前驱体，制造用于太阳能电池、燃料电池催化剂和半导体等各种应用的含硅薄膜。沉积可以在低衬底温度下进行（<150）。TDMAS的熔点和蒸气压在合适的工作范围内，是非常好的气相沉积前驱体。

Application

三(二甲氨基)硅烷可用于：

作为原子层沉积法将硅酸铝沉积到染料敏化太阳能电池TiO₂阳极上的硅源。
作为制造锂离子电池功能化硅增强隔膜的前驱体。

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pictograms

GHS02,GHS06,GHS05

signalword

Danger

存储类别

4.3 - Hazardous materials which set free flammable gases upon contact with water

wgk

WGK 3

flash_point_f

16.0 - 32.0 °F - closed cup

flash_point_c

-8.89 - 0.00 °C - closed cup

Hazard Classifications

Acute Tox. 3 Dermal - Acute Tox. 3 Inhalation - Acute Tox. 4 Oral - Eye Dam. 1 - Flam. Liq. 2 - Skin Corr. 1B - Water-react. 2

法规信息

非剧毒-急性毒性1

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货号	GTIN
759562-25G	04061832916965