Merck
CN

759562

Sigma-Aldrich

三(二甲氨基)硅烷

packaged for use in deposition systems

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别名:
三(二甲氨基)硅烷, (Me2N)3SiH, N,N,N′,N′,N′′, N′′-六甲基硅烷三胺, 三(二甲基氨基)硅烷, N,N,N′,N′,N′′′,N′′′-六甲基硅烷三胺, TDMA
线性分子式:
((CH3)2N)3SiH
CAS号:
分子量:
161.32
EC 号:
MDL编号:
PubChem化学物质编号:
NACRES:
NA.23

质量水平

检测方案

≥99.9% (GC)

形式

liquid

bp

142 °C (lit.)

mp

−90 °C (lit.)

密度

0.838 g/mL at 25 °C (lit.)

SMILES字符串

CN(C)[SiH](N(C)C)N(C)C

InChI

1S/C6H19N3Si/c1-7(2)10(8(3)4)9(5)6/h10H,1-6H3

InChI key

TWVSWDVJBJKDAA-UHFFFAOYSA-N

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应用

三(二甲基氨基)硅烷(TDMAS)用作有机硅源,用于沉积氮氧化硅、碳氮化物、氮化物和氧化物薄膜。它还用于形成含硅多组分薄膜。沉积可以在低衬底温度下进行(<150)。TDMAS的熔点和蒸气压在合适的工作范围内;从而使其成为非常好的气相沉积前体。

警示用语:

Danger

危险分类

Acute Tox. 1 Inhalation - Acute Tox. 3 Dermal - Acute Tox. 4 Oral - Eye Dam. 1 - Flam. Liq. 2 - Skin Corr. 1B - Water-react 2

补充剂危害

储存分类代码

4.3 - Hazardous materials, which set free flammable gases upon contact with water

WGK

WGK 3

闪点(°F)

16.0 - 32.0 °F - closed cup

闪点(°C)

-8.89 - 0,00 °C - closed cup


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  1. Which document(s) contains shelf-life or expiration date information for a given product?

    If available for a given product, the recommended re-test date or the expiration date can be found on the Certificate of Analysis.

  2. How do I get lot-specific information or a Certificate of Analysis?

    The lot specific COA document can be found by entering the lot number above under the "Documents" section.

  3. How do I find price and availability?

    There are several ways to find pricing and availability for our products. Once you log onto our website, you will find the price and availability displayed on the product detail page. You can contact any of our Customer Sales and Service offices to receive a quote.  USA customers:  1-800-325-3010 or view local office numbers.

  4. What is the Department of Transportation shipping information for this product?

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  5. Can the empty deposition cylinders be refilled?

    Yes, we are able to refill these cylinders through our SAFC Hitech group.  Please contact our Technical Service department by email at techserv@sial.com, and they will forward you to the appropriate SAFC Hitech representative for a quote.

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Hirose; F.; Kinoshita; Y.; Shibuya; S.; et al
Thin Solid Films, 519, 270-270 (2011)
Boudreau; M.; Boumerzoug; M.; Mascher; P.; Jessop; P. E.
Applied Physics Letters, 63, 3014-3014 (1993)
B Ballantyne et al.
Toxicology and industrial health, 5(1), 45-54 (1989-01-01)
The acute handling hazards of tris(dimethylamino)silane [TDMAS] were investigated. The acute male rat peroral LD50 (with 95% confidence limits) was 0.71 (0.51-0.97) ml/kg, and the acute male rabbit percutaneous LD50 was 0.57 (0.35-0.92) ml/kg. The liquid was severely irritating to

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