Skip to Content
Merck
CN

289388

Silicon tetrachloride

99.998% trace metals basis

Synonym(s):

STC, Tetrachlorosilane

Sign In to View Organizational & Contract Pricing

Select a Size

About This Item

Linear Formula:
SiCl4
CAS Number:
10026-04-7
Molecular Weight:
169.90
EC Number:
233-054-0
MDL number:
MFCD00011229
UNSPSC Code:
12352103
PubChem Substance ID:
24857194
NACRES:
NA.23

Key Documents

View All Documentation
Technical Service
Need help? Our team of experienced scientists is here for you.
Let Us Assist
Technical Service
Need help? Our team of experienced scientists is here for you.
Let Us Assist

vapor density

5.86 (vs air)

Quality Level

200

vapor pressure

420 mmHg ( 37.7 °C)

Assay

99.998% trace metals basis

form

liquid

reaction suitability

core: silicon

bp

57.6 °C (lit.)

mp

−70 °C (lit.)

density

1.483 g/mL at 25 °C (lit.)

SMILES string

Cl[Si](Cl)(Cl)Cl

InChI

1S/Cl4Si/c1-5(2,3)4

InChI key

FDNAPBUWERUEDA-UHFFFAOYSA-N

Looking for similar products? Visit Product Comparison Guide

Related Categories

General description

Silicon tetrachloride is a highly reactive and volatile inorganic compound widely utilized as a precursor in both solution-based and vapor-phase deposition processes. It plays a critical role in the synthesis of high-purity silicon-based materials such as silicon dioxide (SiO2) and silicon nitride (Si₃N₄), which are essential in a broad range of high-performance applications such as semiconductor industry, optics and photonics. Additionally, it is also used in the manufacture of high-purity silica glass, advanced ceramics, and energy storage components.

Application

Silicon tetrachloride can be used:
  • A precursor in the chemical vapor deposition (CVD) process to deposit silicon onto graphite substrates. This approach results development of high-performance anodes for lithium-ion batteries.
  • A precursor material in the hydrogen thermal plasma (H-plasma) process to synthesize silicon nanospheres, which are suitable for use as anode materials in lithium-ion batteries.

Features and Benefits

Silicon tetrachloride exhibits:
  • High Purity (99.998%): Ensures minimal contamination, crucial for optics and photonics applications
  • Ideal for Semiconductor applications: Its ultra-high purity supports fabrication of advanced integrated circuits, wafers, and solar cells

Pictograms

Skull and crossbonesCorrosion
GHS06,GHS05

Signal Word

Danger

Hazard Statements

H301 + H331,H314,H335

Hazard Classifications

Acute Tox. 3 Inhalation - Acute Tox. 3 Oral - Eye Dam. 1 - Skin Corr. 1A - STOT SE 3

Target Organs

Respiratory system

Supplementary Hazards

EUH014,EUH071

Storage Class Code

6.1C - Combustible acute toxic Cat.3 / toxic compounds or compounds which causing chronic effects

WGK

WGK 1

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

Regulatory Information

危险化学品
This item has

Choose from one of the most recent versions:

Certificates of Analysis (COA)

Lot/Batch Number
SHBK4428
SHBJ0715
SHBH0583V
SHBF2521V
SHBG2090V

Don't see the Right Version?

If you require a particular version, you can look up a specific certificate by the Lot or Batch number.

Search for a COA

Already Own This Product?

Find documentation for the products that you have recently purchased in the Document Library.

Visit the Document Library

An efficient and closed-loop approach to convert silicon tetrachloride to silicon nanospheres anode materials via hydrogen thermal plasma
Yang, Zongxian and Dong,et al.
Materials Research Bulletin, 175, 112765-112765 (2024)
High-performance silicon/graphite anode prepared by CVD using SiCl4 as precursor for Li-ion batteries
Hu, Mengfei and Wu, Houzheng and Zhang, Guo-Jun
Chemical Physics Letters, 833, 140917-140917 (2023)
D Khushalani et al.
Journal of nanoscience and nanotechnology, 1(2), 129-132 (2003-08-14)
Mesostructured silica-nanoparticle monolithic composites have been synthesized by dispersing prefabricated nanoparticles of gold or zeolite (silicalite) in ethanolic reaction mixtures containing SiCl4 and a Pluronic triblock copolymer template. Whereas silicalite nanoparticles were used directly, surface functionalization of the gold nanoparticles
K M Sivanandaiah et al.
International journal of peptide and protein research, 45(4), 377-379 (1995-04-01)
Deprotection of the tert-butoxycarbonyl group during solid-phase synthesis of peptides can be conveniently and efficiently carried out using a neutral reagent, silicon tetrachloride/sodium iodide (iodotrichlorosilane). This simple and rapid method has been advantageously employed during the solid-phase synthesis of the
Pulmonary interstitial emphysema: CT findings.
A C Kemper et al.
AJR. American journal of roentgenology, 172(6), 1642-1642 (1999-06-01)
View All Related Papers

Articles

Chemistry in Flames: From Oxide to Salt and Metal Nanoparticles

Flame spray synthesis allows the scalable fabrication of many mixed oxide, salt, metal, carbon-coated metal, silica-coated metal oxide or even metal-ceramic composite nanoparticles.

Silicon Nitride Atomic Layer Deposition: A Brief Review of Precursor Chemistry

atomic layer deposition (ALD), microelectronics, Mo:Al2O3 films, nanocomposite coating, photovoltaics, semiconductor devices, W:Al2O3 films, composite films, layer-by-layer

Progress in Spintronic Materials

Spintronics offer breakthroughs over conventional memory/logic devices with lower power, leakage, saturation, and complexity.

Synthesis of Melting Gels Using Mono-Substituted and Di-Substituted Alkoxysiloxanes

Synthesis of Melting Gels Using Mono-Substituted and Di-Substituted Alkoxysiloxanes

Our team of scientists has experience in all areas of research including Life Science, Material Science, Chemical Synthesis, Chromatography, Analytical and many others.

Contact Technical Service