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Merck
CN

462993

Methylsilane

electronic grade, ≥99.9%

Synonym(s):

Monosilylmethane, Silaethane, Silylmethane

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About This Item

Linear Formula:
CH3SiH3
CAS Number:
992-94-9
Molecular Weight:
46.14
UNSPSC Code:
12352300
NACRES:
NA.23
PubChem Substance ID:
24869881
EC Number:
213-598-5
Beilstein/REAXYS Number:
1730728
MDL number:
MFCD00053655

Key Documents

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InChI key

UIUXUFNYAYAMOE-UHFFFAOYSA-N

InChI

1S/CH6Si/c1-2/h1-2H3

SMILES string

C[SiH3]

grade

electronic grade

vapor density

0.628 (−58 °C, vs air)

assay

≥99.9%

form

liquid

impurities

<10 ppm Carbon dioxide (CO2), <10 ppm Nitrogen (N2), <100 ppm Dimethylsilane (CH3)2SiH2, <100 ppm Methylchlorosilane CH3SiH2Cl, <2 ppm Argon + Oxygen (Ar + O2), <50 ppm Methane (CH4), <50 ppm Silane (SiH4)

bp

−57 °C (lit.)

mp

−157 °C (lit.)

Features and Benefits

Methylsilane is used in the plasma-assisted CVD of silicon carbide (SiC) and as a precursor to the epitaxial growth of SiGeC alloy layers via rapid thermal CVD. Recent developments include the use of methylsilane as a precursor to silicon-carbon-hydrogen polymer used as photoresists.
Precursor to silicon carbide or alloy thin films by chemical vapor deposition (CVD) and molecular beam epitaxy (MBE).

Other Notes

Stainless steel regulators Z527416 or Z527424 are recommended.

signalword

Danger

Hazard Classifications

Acute Tox. 4 Dermal - Flam. Gas 1 - Press. Gas Liquefied gas

supp_hazards

EUH014

Storage Class

2A - Gases

wgk

WGK 1

flash_point_f

Not applicable

flash_point_c

Not applicable

ppe

Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)

Regulatory Information

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Certificates of Analysis (COA)

Lot/Batch Number
00848JH
15171HH
08894AH
18373CE
09313TQ

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Mi, J.
J. Vac. Sci. Technol. B, 14, 1660-1660 (1996)
Yifan Li et al.
Beilstein journal of nanotechnology, 8, 2504-2514 (2017-12-21)
Interface conditions are an important property that can affect the drag of fluid flow. For surfaces with different oleophobicity, the boundary slip at the solid-oil interface is mostly larger than that at the solid-water interface. Roughness is a key factor
C A Diaz-Botia et al.
Journal of neural engineering, 14(5), 056006-056006 (2017-06-03)
Current neural probes have a limited device lifetime of a few years. Their common failure mode is the degradation of insulating films and/or the delamination of the conductor-insulator interfaces. We sought to develop a technology that does not suffer from
Hai-Feng Wu et al.
Natural product research, 31(21), 2484-2490 (2017-04-14)
One new cycloartane triterpenoid glycoside, soulieoside Q (1), together with four known compounds (2-5) were isolated from the ethanolic extract of the rhizomes of Souliea vaginata Maxim. The structure of the new compound was determined by extensive spectroscopic analysis including
Zulan Li et al.
Biosensors & bioelectronics, 166, 112444-112444 (2020-08-08)
How to balance the sensitivity and signal-to-noise ratio of immunosensor remains many challenges during various diseases diagnosis. Here we develop a new microfluidic immunosensor based on surface-modified mesoporous nanofibers, and simultaneously realize an ultra-sensitivity and high signal-to-noise ratio for the
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