Sign In to View Organizational & Contract Pricing.
Select a Size
Change View
About This Item
Linear Formula:
GeH4
CAS Number:
Molecular Weight:
76.67
UNSPSC Code:
12352300
PubChem Substance ID:
EC Number:
231-961-6
MDL number:
grade
electronic grade
vapor density
1.53 (−142 °C, vs air)
assay
≥99.997%
form
gas
impurities
<0.5 ppm Oxygen (O2), <1 ppm Carbon monoxide + Trigermane (CO+Ge3H8), <1 ppm THC, <1 ppm Water (H2O), <2 ppm Carbon dioxide (CO2), <2 ppm Nitrogen (N2), <20 ppm Digermane (Ge2H6), <5 ppm Chlorogermanes, <5 ppm Germoxanes, <50 ppm Hydrogen (H2)
bp
−88.4 °C (lit.)
mp
−165 °C (lit.)
transition temp
critical temperature 35 °C
SMILES string
[GeH4]
InChI
1S/GeH4/h1H4
InChI key
QUZPNFFHZPRKJD-UHFFFAOYSA-N
Features and Benefits
Germane gas is used in the deposition of epitaxial and amorphous SiGe alloy layers used in the production of high performance devices including photovoltaic cells and integrated circuits (IC). Precursor to germanium-containing thin films by chemical vapor deposition (CVD) and molecular beam epitaxy (MBE). A CVD precursor for germanium carbide semiconducting films.
Other Notes
Stainless steel regulators Z527416 or Z527424 are recommended.
signalword
Danger
hcodes
Hazard Classifications
Acute Tox. 2 Inhalation - Acute Tox. 4 Oral - Flam. Gas 1A - Press. Gas Compr. Gas
Storage Class
2A - Gases
wgk
WGK 3
flash_point_f
Not applicable
flash_point_c
Not applicable
ppe
Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)
Choose from one of the most recent versions:
Already Own This Product?
Find documentation for the products that you have recently purchased in the Document Library.


