463140
Diborane-d6
10% in helium, electronic grade
Synonym(s):
Diborane- d6
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About This Item
Linear Formula:
B2D6
CAS Number:
Molecular Weight:
33.71
NACRES:
NA.23
PubChem Substance ID:
UNSPSC Code:
12352300
MDL number:
InChI
1S/2BH3/h2*1H3/i2*1D3
SMILES string
[2H]B([2H])[2H].[2H]B([2H])[2H]
InChI key
NTJHUEGHVSASEP-RVWRRERJSA-N
grade
electronic grade
form
gas (compressed)
concentration
10% in helium, 9-11% (balance is helium)
bp
−92.5 °C (lit.)
mass shift
M+6
Application
Diborane gas is used primarily as a p-type dopant in the deposition of epitaxial and amorphous silicon thin films. The unique properties of diborane-d6 can result in increased device performance and reliability.
Other Notes
Stainless steel regulators Z527416 or Z527424 are recommended.
signalword
Danger
Hazard Classifications
Acute Tox. 3 Dermal - Acute Tox. 3 Inhalation - Acute Tox. 3 Oral - Eye Irrit. 2 - Flam. Gas 1A - Press. Gas Compr. Gas - Skin Irrit. 2 - STOT SE 3
target_organs
Respiratory system
Storage Class
2A - Gases
wgk
WGK 3
flash_point_f
Not applicable
flash_point_c
Not applicable
Regulatory Information
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