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Merck
CN

463140

Sigma-Aldrich

Diborane-d6

10% in helium, electronic grade

Synonym(s):

Diborane- d6

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About This Item

Linear Formula:
B2D6
CAS Number:
20396-66-1
Molecular Weight:
33.71
MDL number:
MFCD00799509
UNSPSC Code:
12352300
PubChem Substance ID:
24869899
NACRES:
NA.23

Key Documents

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grade

electronic grade

form

gas (compressed)

concentration

10% in helium
9-11% (balance is helium)

bp

−92.5 °C (lit.)

mass shift

M+6

SMILES string

[2H]B([2H])[2H].[2H]B([2H])[2H]

InChI

1S/2BH3/h2*1H3/i2*1D3

InChI key

NTJHUEGHVSASEP-RVWRRERJSA-N

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Application

Diborane gas is used primarily as a p-type dopant in the deposition of epitaxial and amorphous silicon thin films. The unique properties of diborane-d6 can result in increased device performance and reliability.

Other Notes

Stainless steel regulators Z527416 or Z527424 are recommended.

Signal Word

Danger

Hazard Classifications

Acute Tox. 3 Dermal - Acute Tox. 3 Inhalation - Acute Tox. 3 Oral - Eye Irrit. 2 - Flam. Gas 1A - Press. Gas Compr. Gas - Skin Irrit. 2 - STOT SE 3

Target Organs

Respiratory system

Storage Class Code

2A - Gases

WGK

WGK 3

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable

Regulatory Information

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Certificates of Analysis (COA)

Lot/Batch Number
13492HH
12374CC
08613TQ
03313TQ

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