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666610

Tetrakis(dimethylamido)hafnium(IV)

Name: Tetrakis(dimethylamido)hafnium(IV)
Brand: ALDRICH

packaged for use in deposition systems

Synonym(s):

TDMAH, Tetrakis(dimethylamino)hafnium(IV)

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About This Item

Linear Formula:

[(CH₃)₂N]₄Hf

CAS Number:

19782-68-4

Molecular Weight:

354.79

NACRES:

NA.23

PubChem Substance ID:

24884811

UNSPSC Code:

12352103

MDL number:

MFCD01862473

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Properties

Quality Level

100

assay

≥99.99% (trace metals analysis)

form

low-melting solid

reaction suitability

core: hafnium

mp

26-29 °C (lit.)

density

1.098 g/mL at 25 °C

SMILES string

CN(C)[Hf](N(C)C)(N(C)C)N(C)C

InChI

1S/4C2H6N.Hf/c4*1-3-2;/h4*1-2H3;/q4*-1;+4

InChI key

ZYLGGWPMIDHSEZ-UHFFFAOYSA-N

Description

General description

Alkyl amides of Hafnium provide a convenient and effective atomic layer deposition precursor to smooth and and amorphous hafnium oxide thin films.

Application

Used as precursor for atomic layer deposition of Hafnium Oxide nanolaminates, which are used as a reploacement for Silicon oxide in semiconductor devices.

Precursors Packaged for Depositions Systems

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pictograms

GHS02,GHS05

signalword

Danger

Storage Class

4.3 - Hazardous materials which set free flammable gases upon contact with water

wgk

WGK 3

flash_point_f

109.4 °F - closed cup

flash_point_c

43 °C - closed cup

ppe

Eyeshields, Faceshields, Gloves, type P3 (EN 143) respirator cartridges

Hazard Classifications

Flam. Sol. 1 - Skin Corr. 1B - Water-react. 2

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Articles

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Nanocomposite Coatings with Tunable Properties Prepared by Atomic Layer Deposition

Savannah ALD System for Atomic Layer Deposition

Atomic Layer Deposition (ALD) technology ensures uniform coating on complex 3D surfaces with precise chemisorption cycles.

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Surface morphology and crystallinity control in the atomic layer deposition (ALD) of hafnium and zirconium oxide thin films

Hausmann DM, Gordon RG

Journal of Crystal Growth, 249, 251-261 (2003)

High Purity Metalorganic Precursors for CPV Device Fabrication

Rushworth S

Material Matters, 5(4) null

Applied Physics Letters, 91, 193503-193503 (2007)

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Global Trade Item Number

SKU	GTIN
666610-25G	04061832734569