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679208

Methyltrichlorosilane

deposition grade, ≥98% (GC), ≥99.99% (as metals)

Synonym(s):

Trichloro(methyl)silane

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About This Item

Linear Formula:
CH3SiCl3
CAS Number:
75-79-6
Molecular Weight:
149.48
UNSPSC Code:
12352103
NACRES:
NA.23
PubChem Substance ID:
24885475
EC Number:
200-902-6
Beilstein/REAXYS Number:
1361381
MDL number:
MFCD00000481
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grade

deposition grade

vapor density

5.2 (vs air)

vapor pressure

150 mmHg ( 25 °C)

assay

≥98% (GC), ≥99.99% (as metals)

form

liquid

autoignition temp.

>760 °F

expl. lim.

11.9 %

refractive index

n20/D 1.411 (lit.)

bp

66 °C (lit.)

density

1.273 g/mL at 25 °C (lit.)

SMILES string

C[Si](Cl)(Cl)Cl

InChI

1S/CH3Cl3Si/c1-5(2,3)4/h1H3

InChI key

JLUFWMXJHAVVNN-UHFFFAOYSA-N

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Danger

Hazard Classifications

Acute Tox. 3 Inhalation - Acute Tox. 4 Dermal - Acute Tox. 4 Oral - Eye Dam. 1 - Flam. Liq. 2 - Skin Corr. 1A - STOT SE 3

target_organs

Respiratory system

Storage Class

3 - Flammable liquids

wgk

WGK 1

flash_point_f

46.4 °F - closed cup

flash_point_c

8 °C - closed cup

Regulatory Information

危险化学品

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Certificates of Analysis (COA)

Lot/Batch Number
SHBS9341
SHBF8026V
SHBF6342V
SHBF2673V
SHBD5576V

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Yingbin Ge et al.
The journal of physical chemistry. A, 114(6), 2384-2392 (2010-01-29)
The rate constants for the gas-phase reactions in the silicon carbide chemical vapor deposition of methyltrichlorosilane (Ge, Y. B.; Gordon, M. S.; Battaglia, F.; Fox, R. O. J. Phys. Chem. A 2007, 111, 1462.) were calculated. Transition state theory was
Yingbin Ge et al.
The journal of physical chemistry. A, 111(8), 1475-1486 (2007-02-06)
The kinetics for the previously proposed 114-reaction mechanism for the chemical vapor deposition (CVD) process that leads from methyltrichlorosilane (MTS) to silicon carbide (SiC) are examined. Among the 114 reactions, 41 are predicted to proceed with no intervening barrier. For
W H Mullen et al.
Clinica chimica acta; international journal of clinical chemistry, 157(2), 191-198 (1986-06-15)
An enzyme electrode is described based upon the enzyme lactate oxidase (EC 1.1.3.2) coupled to an H2O2 sensor. Use of an organosilane-treated microporous membrane over the enzyme layer, allows responses linear to 18 mmol/l L-lactate with response times of 1-3
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Global Trade Item Number

SKUGTIN
679208-50G04061832749464