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Merck
CN

697281

Tris(tert-butoxy)silanol

packaged for use in deposition systems

Synonym(s):

TBS

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About This Item

Linear Formula:
((CH3)3CO)3SiOH
CAS Number:
Molecular Weight:
264.43
NACRES:
NA.23
PubChem Substance ID:
UNSPSC Code:
12352103
MDL number:
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assay

≥99.0% (GC), ≥99.998% trace metals basis (ICP)

form

solid

bp

205-210 °C (lit.)

mp

63-65 °C (lit.)

SMILES string

CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C

InChI

1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3

InChI key

HLDBBQREZCVBMA-UHFFFAOYSA-N

General description

Atomic number of base material: 14 Silicon


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Storage Class

11 - Combustible Solids

wgk

WGK 3

flash_point_f

Not applicable

flash_point_c

Not applicable

ppe

Eyeshields, Gloves, type N95 (US)

Regulatory Information

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Articles

High Purity Metalorganic Precursors for CPV Device Fabrication

atomic layer deposition (ALD), microelectronics, Mo:Al2O3 films, nanocomposite coating, photovoltaics, semiconductor devices, W:Al2O3 films, composite films, layer-by-layer

Atomic Layer Deposition (ALD) technology ensures uniform coating on complex 3D surfaces with precise chemisorption cycles.


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Global Trade Item Number

SKUGTIN
697281-25G04061833607404