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Merck
CN

730734

Sigma-Aldrich

Trimethylgallium

packaged for use in deposition systems

Synonym(s):

Me3Ga, TMGa, TMG

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About This Item

Linear Formula:
Ga(CH3)3
CAS Number:
1445-79-0
Molecular Weight:
114.83
EC Number:
215-897-6
MDL number:
MFCD00014841
UNSPSC Code:
12352103
PubChem Substance ID:
329764589
NACRES:
NA.23

Key Documents

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Quality Level

100

form

liquid

reaction suitability

core: gallium

bp

92.5 °C/760 mmHg (lit.)

mp

-15.8 °C (lit.)

density

1.132 g/mL at 25 °C

SMILES string

C[Ga](C)C

InChI

1S/3CH3.Ga/h3*1H3;

InChI key

XCZXGTMEAKBVPV-UHFFFAOYSA-N

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General description

Trimethylgallium (TMGa) [Ga(CH3)3] is a high-purity (99.9999%), colorless, and pyrophoric organometallic compound widely used as a key precursor in metal-organic chemical vapor deposition (MOCVD) for semiconductor manufacturing. Its high volatility and metal-organic reactivity make it essential for producing gallium-containing thin films in optoelectronics, photovoltaics, and high-frequency devices. TMGa′s ultra-low impurity levels ensure performance consistency in applications such as LEDs, laser diodes, and high-electron-mobility transistors (HEMTs). Recent advancements have also extended its role to quantum dot synthesis and photonic integrated circuits for energy-efficient and IoT-enabled technologies.

Application

Trimethylgallium can be used as:
  • A precursor to synthesize β-gallium oxide (β-Ga₂O₃) thin films for high-power electronic devices, offering superior breakdown voltage and thermal stability.
  • A precursor for epitaxial growth of gallium nitride (GaN) in blue LEDs and laser diodes, enabling high-brightness displays and optical communication systems.
  • A component in colloidal quantum dot synthesis for tunable near-infrared LEDs in biomedical imaging and telecommunications.
  • A source material for gallium arsenide (GaAs) layers in high-electron-mobility transistors (HEMTs), critical for 5G millimeter-wave amplifiers.

Pictograms

FlameCorrosion
GHS02,GHS05

Signal Word

Danger

Hazard Statements

H250,H260,H314

Hazard Classifications

Eye Dam. 1 - Pyr. Liq. 1 - Skin Corr. 1B - Water-react 1

Supplementary Hazards

EUH014

Storage Class Code

4.2 - Pyrophoric and self-heating hazardous materials

WGK

WGK 3

Regulatory Information

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Certificates of Analysis (COA)

Lot/Batch Number
HHBB6791V
HHBB6790V
HHBB6070V
HHBB6461V
HHBB5360V

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  1. Which document(s) contains shelf-life or expiration date information for a given product?

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  5. Can the empty deposition cylinders be refilled?

    Yes, we are able to refill these cylinders through our SAFC Hitech group.  Please contact our Technical Service department by email at techserv@sial.com, and they will forward you to the appropriate SAFC Hitech representative for a quote.

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