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753041

Tungsten(VI) fluoride

packaged for use in deposition systems, ≥99.9%

Synonym(s):

Hexafluorotungsten, Tungsten hexafluoride

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About This Item

Linear Formula:
WF6
CAS Number:
7783-82-6
Molecular Weight:
297.83
UNSPSC Code:
12352300
PubChem Substance ID:
329766332
EC Number:
232-029-1
MDL number:
MFCD00040536
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assay

≥99.9%

reaction suitability

core: tungsten

bp

17.5 °C (lit.)

mp

2.3 °C (lit.)

SMILES string

F[W](F)(F)(F)(F)F

InChI

1S/6FH.W/h6*1H;/q;;;;;;+6/p-6

InChI key

NXHILIPIEUBEPD-UHFFFAOYSA-H

signalword

Danger

Hazard Classifications

Acute Tox. 2 Inhalation - Press. Gas Compr. Gas - Skin Corr. 1A

supp_hazards

EUH071

Storage Class

2A - Gases

wgk

WGK 3

flash_point_f

Not applicable

flash_point_c

Not applicable

Regulatory Information

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Certificates of Analysis (COA)

Lot/Batch Number
SHBC2571

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Kim; Y.S.; Sung; M-G.; Park; S.-K.
Solid-State Electron, 54, 650-650 (2009)
Klaus; J.W.; Ferro; S.J.; George; S.M.
Thin Solid Films, 360, 145-145 (2000)
Plyushcheva; S.V.; Mikhailov; G.M.; Shabel'nikov; L.G.; Shapoval; S.Y.
Inorganic Materials, 45, 140-140 (2009)