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Merck
CN

759562

Sigma-Aldrich

Tris(dimethylamino)silane

packaged for use in deposition systems

Synonym(s):

Tris(dimethylamino)silane, (Me2N)3SiH, N,N,N′,N′,N′′, N′′-Hexamethylsilanetriamine, Tris(dimethylamido)silane, N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine, TDMAS

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About This Item

Linear Formula:
((CH3)2N)3SiH
CAS Number:
15112-89-7
Molecular Weight:
161.32
EC Number:
239-165-0
MDL number:
MFCD00048006
UNSPSC Code:
12352103
PubChem Substance ID:
329766793
NACRES:
NA.23

Key Documents

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Quality Level

100

Assay

≥99.9% (GC)

form

liquid

bp

142 °C (lit.)

mp

−90 °C (lit.)

density

0.838 g/mL at 25 °C (lit.)

SMILES string

CN(C)[SiH](N(C)C)N(C)C

InChI

1S/C6H19N3Si/c1-7(2)10(8(3)4)9(5)6/h10H,1-6H3

InChI key

TWVSWDVJBJKDAA-UHFFFAOYSA-N

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General description

Tris(dimethylamino)silane is an organosilicon compound with high volatility and thermal stability, widely used as a vapor deposition precursor to fabricate silicon-containing thin films for various applications, including solar cells, fuel cell catalysts, and semiconductors. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range, thus making it a very good vapor deposition precursor.

Application

Tris(dimethylamino)silane can be used:
  • As a silicon source for deposition of aluminum silicate on TiO2 anodes for dye-sensitized solar cells vis atomic layer deposition method.
  • As a precursor to fabricate functionalized Si reinforced separators for Li-ion batteries.

Signal Word

Danger

Hazard Classifications

Acute Tox. 3 Dermal - Acute Tox. 3 Inhalation - Acute Tox. 4 Oral - Eye Dam. 1 - Flam. Liq. 2 - Skin Corr. 1B - Water-react 2

Supplementary Hazards

EUH029

Storage Class Code

4.3 - Hazardous materials which set free flammable gases upon contact with water

WGK

WGK 3

Flash Point(F)

16.0 - 32.0 °F - closed cup

Flash Point(C)

-8.89 - 0.00 °C - closed cup

Regulatory Information

非剧毒-急性毒性1
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Certificates of Analysis (COA)

Lot/Batch Number
SHBR0510
SHBJ8726
SHBG7213V
SHBG2008V
SHBC4237V

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  1. Which document(s) contains shelf-life or expiration date information for a given product?

    If available for a given product, the recommended re-test date or the expiration date can be found on the Certificate of Analysis.

  2. How do I get lot-specific information or a Certificate of Analysis?

    The lot specific COA document can be found by entering the lot number above under the "Documents" section.

  3. How do I find price and availability?

    There are several ways to find pricing and availability for our products. Once you log onto our website, you will find the price and availability displayed on the product detail page. You can contact any of our Customer Sales and Service offices to receive a quote.  USA customers:  1-800-325-3010 or view local office numbers.

  4. What is the Department of Transportation shipping information for this product?

    Transportation information can be found in Section 14 of the product's (M)SDS.To access the shipping information for this material, use the link on the product detail page for the product. 

  5. Can the empty deposition cylinders be refilled?

    Yes, we are able to refill these cylinders through our SAFC Hitech group.  Please contact our Technical Service department by email at techserv@sial.com, and they will forward you to the appropriate SAFC Hitech representative for a quote.

  6. My question is not addressed here, how can I contact Technical Service for assistance?

    Ask a Scientist here.

Boudreau; M.; Boumerzoug; M.; Mascher; P.; Jessop; P. E.
Applied Physics Letters, 63, 3014-3014 (1993)
Hirose; F.; Kinoshita; Y.; Shibuya; S.; et al
Thin Solid Films, 519, 270-270 (2011)
B Ballantyne et al.
Toxicology and industrial health, 5(1), 45-54 (1989-01-01)
The acute handling hazards of tris(dimethylamino)silane [TDMAS] were investigated. The acute male rat peroral LD50 (with 95% confidence limits) was 0.71 (0.51-0.97) ml/kg, and the acute male rabbit percutaneous LD50 was 0.57 (0.35-0.92) ml/kg. The liquid was severely irritating to

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