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760293

2,4,6,8-Tetramethylcyclotetrasiloxane

packaged for use in deposition systems

Synonym(s):

1,3,5,7-Cyclotetra(methylsiloxane), 1,3,5,7-Tetramethylcyclotetrasiloxane, TMCTS

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About This Item

Linear Formula:
(HSiCH3O)4
CAS Number:
2370-88-9
Molecular Weight:
240.51
UNSPSC Code:
12352103
NACRES:
NA.23
PubChem Substance ID:
329766852
EC Number:
219-137-4
Beilstein/REAXYS Number:
1775282
MDL number:
MFCD00039567
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grade

deposition grade

assay

≥99.5% (GC), ≥99.999% (trace metals analysis)

form

liquid

refractive index

n20/D 1.387 (lit.)

bp

134 °C (lit.)

mp

−69 °C (lit.)

density

0.986 g/mL at 25 °C (lit.)

storage temp.

2-8°C

SMILES string

C[SiH]1O[SiH](C)O[SiH](C)O[SiH](C)O1

InChI

1S/C4H16O4Si4/c1-9-5-10(2)7-12(4)8-11(3)6-9/h9-12H,1-4H3

InChI key

BQYPERTZJDZBIR-UHFFFAOYSA-N

Application

2, 4, 6, 8-Tetramethylcyclotetrasiloxane (TMCTS) is an important precursor for the deposition of polysiloxane, cyclic siloxane, silicon dioxide, oxycarbide thin films with low dielectric constant for microelectronics, semiconductors and other applications

Features and Benefits

Precursor for gate dielectrics in thin-film transistors (TFT), and is a component of photochemically formed SiOX monolayers on TiO.

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pictograms

Flame
GHS02

signalword

Warning

hcodes

H226

Hazard Classifications

Flam. Liq. 3

Storage Class

3 - Flammable liquids

wgk

WGK 3

flash_point_f

75.2 °F - closed cup

flash_point_c

24 °C - closed cup

Regulatory Information

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Ward, L. J.; et al.
Langmuir, 19, 2110-2110 (2003)
Pai, C. S.; et al.
Materials Chemistry and Physics, 44, 1-1 (1996)
Dae-Yoon Kim et al.
Soft matter, 11(1), 58-68 (2014-11-20)
Unconventional star-shaped liquid crystals (abbreviated as SiLCs) were successfully synthesized by chemically connecting four cyanobiphenyl anisotropic mesogens to the periphery of a super-hydrophobic and ultra-flexible cyclic tetramethyltetrasiloxane ring with flexible hexyl chains. Based on the combined experimental techniques of differential

Global Trade Item Number

SKUGTIN
760293-25ML04061838141170