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Merck
CN

760293

Sigma-Aldrich

2,4,6,8-Tetramethylcyclotetrasiloxane

packaged for use in deposition systems

Synonym(s):

1,3,5,7-Cyclotetra(methylsiloxane), 1,3,5,7-Tetramethylcyclotetrasiloxane, TMCTS

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About This Item

Linear Formula:
(HSiCH3O)4
CAS Number:
2370-88-9
Molecular Weight:
240.51
Beilstein:
1775282
EC Number:
219-137-4
MDL number:
MFCD00039567
UNSPSC Code:
12352103
PubChem Substance ID:
329766852
NACRES:
NA.23

Key Documents

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grade

deposition grade

Assay

≥99.5% (GC)
≥99.999% (trace metals analysis)

form

liquid

refractive index

n20/D 1.387 (lit.)

bp

134 °C (lit.)

mp

−69 °C (lit.)

density

0.986 g/mL at 25 °C (lit.)

storage temp.

2-8°C

SMILES string

C[SiH]1O[SiH](C)O[SiH](C)O[SiH](C)O1

InChI

1S/C4H16O4Si4/c1-9-5-10(2)7-12(4)8-11(3)6-9/h9-12H,1-4H3

InChI key

BQYPERTZJDZBIR-UHFFFAOYSA-N

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Application

2, 4, 6, 8-Tetramethylcyclotetrasiloxane (TMCTS) is an important precursor for the deposition of polysiloxane, cyclic siloxane, silicon dioxide, oxycarbide thin films with low dielectric constant for microelectronics, semiconductors and other applications

Features and Benefits

Precursor for gate dielectrics in thin-film transistors (TFT), and is a component of photochemically formed SiOX monolayers on TiO.

Pictograms

Flame
GHS02

Signal Word

Warning

Hazard Statements

H226

Hazard Classifications

Flam. Liq. 3

Storage Class Code

3 - Flammable liquids

WGK

WGK 3

Flash Point(F)

75.2 °F - closed cup

Flash Point(C)

24 °C - closed cup

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