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469858

Tetrakis(dimethylamido)titanium(IV)

99.999% trace metals basis

Synonym(s):

TDMAT, Tetrakis(dimethylamino)titanium(IV)

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About This Item

Linear Formula:
[(CH3)2N]4Ti
CAS Number:
3275-24-9
Molecular Weight:
224.17
NACRES:
NA.23
PubChem Substance ID:
24870618
UNSPSC Code:
12352103
EC Number:
221-904-3
MDL number:
MFCD00014861
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Quality Segment

200

assay

99.999% trace metals basis

form

liquid

reaction suitability

core: titanium

bp

50 °C/0.5 mmHg (lit.)

density

0.947 g/mL at 25 °C (lit.)

SMILES string

CN(C)[Ti](N(C)C)(N(C)C)N(C)C

InChI

1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4

InChI key

MNWRORMXBIWXCI-UHFFFAOYSA-N

General description

Tetrakis(dimethylamido)titanium(IV) [Ti(N(CH₃)₂)₄], or TDMAT, is a volatile, colourless to pale yellow liquid. Its high volatility and thermal stability make it suitable for chemical vapor deposition (CVD) and atomic layer deposition (ALD), enabling the controlled deposition of titanium-based films such as titanium nitride (TiN) and titanium dioxide (TiO₂). It also supports uniform film growth at low temperatures, making it compatible with temperature-sensitive substrates

Application

Tetrakis(dimethylamido)titanium(IV) (TDMAT) is a precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD)and titanium dioxide thin films by atomic layer deposition (ALD).TDMAT undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).

Features and Benefits

  • 99.999% trace metals basis ensures superior quality of deposited films, with minimal defects and consistent properties, critical for microelectronics and optoelectronics applications.
  • High purity reduces the risk of contamination during the coating process, leading to enhanced adhesion, durability, and performance of the final products.
  • The absence of impurities allows for the precise control of particle size and morphology, improving the effectiveness of nanoparticles in targeted applications.
  • High purity ensures that electronic properties are not compromised by impurities, enhancing device performance and reliability.
  • Controlling heavy metals at ppb levels ensures effective contamination control, regulatory compliance, and optimized performance.

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pictograms

FlameCorrosion
GHS02,GHS05

signalword

Danger

supp_hazards

EUH014

Storage Class

4.3 - Hazardous materials which set free flammable gases upon contact with water

flash_point_f

-22.0 °F - closed cup

flash_point_c

-30 °C - closed cup

ppe

Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter

Hazard Classifications

Flam. Liq. 2 - Skin Corr. 1B - Water-react. 1

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