688509
Silicon tetrachloride
packaged for use in deposition systems
Synonym(s):
STC, Tetrachlorosilane
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About This Item
vapor density
5.86 (vs air)
Quality Level
vapor pressure
420 mmHg ( 37.7 °C)
Assay
99.998% trace metals basis
form
liquid
reaction suitability
core: silicon
bp
57.6 °C (lit.)
mp
−70 °C (lit.)
density
1.483 g/mL at 25 °C (lit.)
SMILES string
Cl[Si](Cl)(Cl)Cl
InChI
1S/Cl4Si/c1-5(2,3)4
InChI key
FDNAPBUWERUEDA-UHFFFAOYSA-N
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General description
Application
Signal Word
Danger
Hazard Statements
Precautionary Statements
Hazard Classifications
Acute Tox. 3 Inhalation - Acute Tox. 3 Oral - Eye Dam. 1 - Skin Corr. 1A - STOT SE 3
Target Organs
Respiratory system
Supplementary Hazards
Storage Class Code
6.1C - Combustible acute toxic Cat.3 / toxic compounds or compounds which causing chronic effects
WGK
WGK 1
Flash Point(F)
Not applicable
Flash Point(C)
Not applicable
Personal Protective Equipment
Regulatory Information
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Can the empty deposition cylinders be refilled?
Yes, we are able to refill these cylinders through our SAFC Hitech group. Please contact our Technical Service department by email at techserv@sial.com, and they will forward you to the appropriate SAFC Hitech representative for a quote.
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