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688509

Silicon tetrachloride

packaged for use in deposition systems

Synonym(s):

STC, Tetrachlorosilane

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About This Item

Linear Formula:
SiCl4
CAS Number:
10026-04-7
Molecular Weight:
169.90
NACRES:
NA.23
PubChem Substance ID:
329761169
UNSPSC Code:
12352103
MDL number:
MFCD00011229
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vapor density

5.86 (vs air)

Quality Segment

100

vapor pressure

420 mmHg ( 37.7 °C)

assay

99.998% trace metals basis

form

liquid

reaction suitability

core: silicon, reactivity: alcohol reactive, reagent type: protection reagent

bp

57.6 °C (lit.)

mp

−70 °C (lit.)

density

1.483 g/mL at 25 °C (lit.)

SMILES string

Cl[Si](Cl)(Cl)Cl

InChI

1S/Cl4Si/c1-5(2,3)4

InChI key

FDNAPBUWERUEDA-UHFFFAOYSA-N

General description

Atomic number of base material: 14 Silicon

Application

Precursors Packaged for Depositions Systems

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pictograms

Skull and crossbonesCorrosion
GHS06,GHS05

signalword

Danger

Hazard Classifications

Acute Tox. 3 Inhalation - Acute Tox. 3 Oral - Eye Dam. 1 - Skin Corr. 1A - STOT SE 3

target_organs

Respiratory system

supp_hazards

EUH014,EUH071

Storage Class

6.1C - Combustible acute toxic Cat.3 / toxic compounds or compounds which causing chronic effects

wgk

WGK 1

flash_point_f

Not applicable

flash_point_c

Not applicable

ppe

Faceshields, Gloves, Goggles

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