462993
甲基硅烷
electronic grade, ≥99.9%
别名:
Monosilylmethane, Silaethane, Silylmethane
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关于此项目
线性分子式:
CH3SiH3
化学文摘社编号:
分子量:
46.14
UNSPSC Code:
12352300
NACRES:
NA.23
PubChem Substance ID:
EC Number:
213-598-5
Beilstein/REAXYS Number:
1730728
MDL number:
InChI key
UIUXUFNYAYAMOE-UHFFFAOYSA-N
InChI
1S/CH6Si/c1-2/h1-2H3
SMILES string
C[SiH3]
grade
electronic grade
vapor density
0.628 (−58 °C, vs air)
assay
≥99.9%
form
liquid
impurities
<10 ppm Carbon dioxide (CO2), <10 ppm Nitrogen (N2), <100 ppm Dimethylsilane (CH3)2SiH2, <100 ppm Methylchlorosilane CH3SiH2Cl, <2 ppm Argon + Oxygen (Ar + O2), <50 ppm Methane (CH4), <50 ppm Silane (SiH4)
bp
−57 °C (lit.)
mp
−157 °C (lit.)
Features and Benefits
甲基硅烷用于碳化硅 (SiC) 的等离子体辅助 CVD，以及作为 SiGeC 合金层通过快速热 CVD 法外延生长的前体。最新的进展包括使用甲基硅烷作为硅-碳-氢聚合物（用作光致抗蚀剂）的前体。
通过化学气相沉积 (CVD) 和分子束外延 (MBE) 形成碳化硅或合金薄膜时的前体。
Other Notes
推荐使用不锈钢调节器 Z527416 或 Z527424。
signalword
Danger
hcodes
Hazard Classifications
Acute Tox. 4 Dermal - Flam. Gas 1 - Press. Gas Liquefied gas
supp_hazards
存储类别
2A - Gases
wgk
WGK 1
flash_point_f
Not applicable
flash_point_c
Not applicable
ppe
Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)
法规信息
新产品
此项目有
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