463019
四氟化硅
electronic grade, ≥99.99%
别名:
氟化硅(IV)
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线性分子式:
SiF4
化学文摘社编号:
分子量:
104.08
NACRES:
NA.23
PubChem Substance ID:
UNSPSC Code:
12352300
EC Number:
232-015-5
MDL number:
产品名称
四氟化硅, electronic grade, ≥99.99%
Quality Level
InChI key
ABTOQLMXBSRXSM-UHFFFAOYSA-N
InChI
1S/F4Si/c1-5(2,3)4
SMILES string
F[Si](F)(F)F
grade
electronic grade
assay
≥99.99%
form
liquid
reaction suitability
core: silicon
impurities
<0.5 ppm Carbon monoxide (CO)
<1 ppm Argon + oxygen (Ar + O2)
<1 ppm Carbon dioxide (CO2)
<10 ppm Methane (CH4)
<3 ppm Nitrogen (N2)
<50 ppm Hydrogen fluoride (HF)
bp
−86 °C (lit.)
mp
−90 °C (lit.)
transition temp
critical temperature −14.2 °C
density
3.57 g/mL at 25 °C (lit.)
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Application
四氟化硅被用于离子注入工艺，并通过等离子体辅助CVD作为氟化二氧化硅的前体。SiF4-SiH4-H2的混合物最近已被用于通过远程等离子体化学气相沉积（RPCVD）沉积多晶硅薄膜。这种氟化薄膜在室温下表现出可见光致发光（PL）。
Other Notes
参见技术信息手册AL-151 气体调节器：选型、安装和操作
Packaging
储存于碳钢气阀瓶中，带CGA180M/CGA110F针阀。
适用：
适用：
- Aldrich®气阀瓶站系统
- Aldrich®气阀瓶气体调节器
Legal Information
Aldrich is a registered trademark of Sigma-Aldrich Co. LLC
signalword
Danger
hcodes
Hazard Classifications
Acute Tox. 2 Inhalation - Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1A
supp_hazards
存储类别
2A - Gases
wgk
WGK 3
flash_point_f
Not applicable
flash_point_c
Not applicable
ppe
Faceshields, Gloves, Goggles
法规信息
新产品
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Shou-Nan Li et al.
AIHA journal : a journal for the science of occupational and environmental health and safety, 64(3), 408-414 (2003-06-18)
A mobile extractive Fourier transform infrared (FTIR) spectrometer was successfully used to locate, identify, and quantify the "odor" sources inside the cleanroom of a semiconductor manufacturing plant. It was found that ozone (O(3)) gas with a peak concentration of 120
M J Laster et al.
Anesthesia and analgesia, 91(4), 985-988 (2000-09-27)
On two occasions, sevoflurane distributed for clinical practice has been found to be contaminated with compounds thought to include hydrogen fluoride (HF) and silicon tetrafluoride (SiF(4)). Both compounds can produce pulmonary injury. However, injury would require fractional distillation of the
R Chirakal et al.
Journal of nuclear medicine : official publication, Society of Nuclear Medicine, 27(3), 417-421 (1986-03-01)
The radiofluorination of L-dopa with [18F]F2 was investigated with the purpose of improving the yield of 6-[18F]fluoro-L-dopa. When boron trifluoride was added to the reaction mixture in hydrogen fluoride (HF), the yield was increased threefold. Nine millicuries of 6-[18F]fluoro-L-dopa were
Diffusion and Defect Data, Solid State Data, Part B, 51-52, 149-149 (1996)
[Experimental study of toxic properties of silicon tetrafluoride].
G I Rumiantsev et al.
Gigiena i sanitariia, (5)(5), 31-33 (1991-05-01)
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