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Merck
CN

463027

锗烷

electronic grade, ≥99.997%

别名:

Germanium tetrahydride, Germanium(4+) hydride, Monogermane, Tetrahydrogermane

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关于此项目

线性分子式:
GeH4
化学文摘社编号:
7782-65-2
分子量:
76.67
UNSPSC Code:
12352300
PubChem Substance ID:
24869887
EC Number:
231-961-6
MDL number:
MFCD00011028

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产品名称

锗烷, electronic grade, ≥99.997%

InChI key

QUZPNFFHZPRKJD-UHFFFAOYSA-N

InChI

1S/GeH4/h1H4

SMILES string

[GeH4]

grade

electronic grade

vapor density

1.53 (−142 °C, vs air)

assay

≥99.997%

form

gas

impurities

<0.5 ppm Oxygen (O2)
<1 ppm Carbon monoxide + Trigermane (CO+Ge3H8)
<1 ppm THC
<1 ppm Water (H2O)
<2 ppm Carbon dioxide (CO2)
<2 ppm Nitrogen (N2)
<20 ppm Digermane (Ge2H6)
<5 ppm Chlorogermanes
<5 ppm Germoxanes
<50 ppm Hydrogen (H2)

bp

−88.4 °C (lit.)

mp

−165 °C (lit.)

transition temp

critical temperature 35 °C

Features and Benefits

锗烷气用于外延 和无定形硅锗合金层的沉积，以用于制造包括光伏电池和集成电路 (IC) 在内的高性能器件。通过化学气相沉积 (CVD) 和分子束外延 (MBE) 形成含锗薄膜时的前体。碳化锗半导体膜的 CVD 前体。

Other Notes

建议使用不锈钢调节器 Z527416 或 Z527424。

signalword

Danger

Hazard Classifications

Acute Tox. 2 Inhalation - Acute Tox. 4 Oral - Flam. Gas 1A - Press. Gas Compr. Gas

存储类别

2A - Gases

wgk

WGK 3

flash_point_f

Not applicable

flash_point_c

Not applicable

ppe

Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)

法规信息

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历史批次信息供参考:

分析证书(COA)

Lot/Batch Number
04245HH
15013TQ
12474CC
14813TQ
07406HO

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