463027
锗烷
electronic grade, ≥99.997%
别名:
Germanium tetrahydride, Germanium(4+) hydride, Monogermane, Tetrahydrogermane
等级
electronic grade
蒸汽密度
1.53 (−142 °C, vs air)
方案
≥99.997%
表单
gas
杂质
<0.5 ppm Oxygen (O2)
<1 ppm Carbon monoxide + Trigermane (CO+Ge3H8)
<1 ppm THC
<1 ppm Water (H2O)
<2 ppm Carbon dioxide (CO2)
<2 ppm Nitrogen (N2)
<20 ppm Digermane (Ge2H6)
<5 ppm Chlorogermanes
<5 ppm Germoxanes
<50 ppm Hydrogen (H2)
沸点
−88.4 °C (lit.)
mp
−165 °C (lit.)
转变温度
critical temperature 35 °C
SMILES字符串
[GeH4]
InChI
1S/GeH4/h1H4
InChI key
QUZPNFFHZPRKJD-UHFFFAOYSA-N
特点和优势
锗烷气用于外延 和无定形硅锗合金层的沉积，以用于制造包括光伏电池和集成电路 (IC) 在内的高性能器件。通过化学气相沉积 (CVD) 和分子束外延 (MBE) 形成含锗薄膜时的前体。碳化锗半导体膜的 CVD 前体。
其他说明
建议使用不锈钢调节器 Z527416 或 Z527424。
警示用语：
Danger
危险分类
Acute Tox. 2 Inhalation - Acute Tox. 4 Oral - Flam. Gas 1A - Press. Gas Compr. Gas
储存分类代码
2A - Gases
WGK
WGK 3
闪点(°F)
Not applicable
闪点(°C)
Not applicable
个人防护装备
Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)
法规信息
新产品
此项目有
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