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Merck
CN

463094

三甲基硼

electronic grade, ≥98.35%

别名:

Trimethylborane

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关于此项目

线性分子式:
B(CH3)3
化学文摘社编号:
分子量:
55.91
UNSPSC Code:
12352300
PubChem Substance ID:
EC Number:
209-816-3
MDL number:
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grade

electronic grade

assay

≥98.35%

form

gas

reaction suitability

core: boron

impurities

<1 ppm Oxygen (O2), <1.5% Dimethylethylborane [B(CH3)2C2H5], <10 ppm Carbon dioxide (CO2), <10 ppm Nitrogen (N2), <100 ppm Methane (CH4), <1000 ppm Trimethylamine (TMA), <50 ppm Hydrogen (H2)

bp

−20.2 °C (lit.)

mp

−161.5 °C (lit.)

SMILES string

CB(C)C

InChI

1S/C3H9B/c1-4(2)3/h1-3H3

InChI key

WXRGABKACDFXMG-UHFFFAOYSA-N

Application

化学气相沉积 (CVD) 所形成碳化硼薄膜的前体。
三甲基硼可作为硼-碳膜化学气相沉积的有机金属前体,以及硼磷硅玻璃 (BPSG) 沉积的硼源。

Other Notes

建议使用不锈钢调节器 Z527416 或 Z527424。


pictograms

Gas cylinderCorrosion

signalword

Danger

hcodes

Hazard Classifications

Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1B

存储类别

2A - Gases

wgk

WGK 1

flash_point_f

Not applicable

flash_point_c

Not applicable

ppe

Faceshields, Gloves, Goggles, multi-purpose combination respirator cartridge (US)

法规信息

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分析证书(COA)

Lot/Batch Number

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