等级
electronic grade
方案
≥98.35%
表单
gas
反应适用性
core: boron
杂质
<1 ppm Oxygen (O2)
<1.5% Dimethylethylborane [B(CH3)2C2H5]
<10 ppm Carbon dioxide (CO2)
<10 ppm Nitrogen (N2)
<100 ppm Methane (CH4)
<1000 ppm Trimethylamine (TMA)
<50 ppm Hydrogen (H2)
沸点
−20.2 °C (lit.)
mp
−161.5 °C (lit.)
SMILES字符串
CB(C)C
InChI
1S/C3H9B/c1-4(2)3/h1-3H3
InChI key
WXRGABKACDFXMG-UHFFFAOYSA-N
应用
三甲基硼可作为硼-碳膜化学气相沉积的有机金属前体，以及硼磷硅玻璃 (BPSG) 沉积的硼源。
化学气相沉积 (CVD) 所形成碳化硼薄膜的前体。
其他说明
建议使用不锈钢调节器 Z527416 或 Z527424。
警示用语：
Danger
危险声明
危险分类
Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1B
储存分类代码
2A - Gases
WGK
WGK 1
闪点(°F)
Not applicable
闪点(°C)
Not applicable
个人防护装备
Faceshields, Gloves, Goggles, multi-purpose combination respirator cartridge (US)
法规信息
新产品
此项目有
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