Quality Segment
assay
99.999% trace metals basis
form
liquid
reaction suitability
core: titanium
bp
50 °C/0.5 mmHg (lit.)
density
0.947 g/mL at 25 °C (lit.)
SMILES string
CN(C)[Ti](N(C)C)(N(C)C)N(C)C
InChI
1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
InChI key
MNWRORMXBIWXCI-UHFFFAOYSA-N
General description
请咨询批量、价格和包装选择。
Application
Tetrakis(二甲基氨基)钛(IV)(TDMAT)是通过有机金属化学气相沉积(OMCVD)和通过原子层沉积(ALD)的二氧化钛薄膜的氮化钛(TiN)薄膜的前体。TDMAT 与过量的环戊二烯发生放热反应得到三(二甲基氨基)(η5-环戊二烯基)钛(IV)。
Features and Benefits
- 99.999% trace metals basis ensures superior quality of deposited films, with minimal defects and consistent properties, critical for microelectronics and optoelectronics applications.
- High purity reduces the risk of contamination during the coating process, leading to enhanced adhesion, durability, and performance of the final products.
- The absence of impurities allows for the precise control of particle size and morphology, improving the effectiveness of nanoparticles in targeted applications.
- High purity ensures that electronic properties are not compromised by impurities, enhancing device performance and reliability.
- Controlling heavy metals at ppb levels ensures effective contamination control, regulatory compliance, and optimized performance.
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signalword
Danger
hcodes
supp_hazards
存储类别
4.3 - Hazardous materials which set free flammable gases upon contact with water
flash_point_f
-22.0 °F - closed cup
flash_point_c
-30 °C - closed cup
ppe
Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter
Hazard Classifications
Flam. Liq. 2 - Skin Corr. 1B - Water-react. 1

