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469858

四(二甲基胺基)钛(IV)

99.999% trace metals basis

别名:

TDMAT, 四(二甲基氨基)钛(IV)

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关于此项目

线性分子式:
[(CH3)2N]4Ti
化学文摘社编号:
3275-24-9
分子量:
224.17
NACRES:
NA.23
PubChem Substance ID:
24870618
UNSPSC Code:
12352103
EC Number:
221-904-3
MDL number:
MFCD00014861
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Quality Level

200

assay

99.999% trace metals basis

form

liquid

reaction suitability

core: titanium

bp

50 °C/0.5 mmHg (lit.)

density

0.947 g/mL at 25 °C (lit.)

SMILES string

CN(C)[Ti](N(C)C)(N(C)C)N(C)C

InChI

1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4

InChI key

MNWRORMXBIWXCI-UHFFFAOYSA-N

General description

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Application

Tetrakis（二甲基氨基）钛（IV）（TDMAT）是通过有机金属化学气相沉积（OMCVD）和通过原子层沉积（ALD）的二氧化钛薄膜的氮化钛（TiN）薄膜的前体。TDMAT 与过量的环戊二烯发生放热反应得到三（二甲基氨基）（η5-环戊二烯基）钛（IV）。

Features and Benefits

  • 99.999% trace metals basis ensures superior quality of deposited films, with minimal defects and consistent properties, critical for microelectronics and optoelectronics applications.
  • High purity reduces the risk of contamination during the coating process, leading to enhanced adhesion, durability, and performance of the final products.
  • The absence of impurities allows for the precise control of particle size and morphology, improving the effectiveness of nanoparticles in targeted applications.
  • High purity ensures that electronic properties are not compromised by impurities, enhancing device performance and reliability.
  • Controlling heavy metals at ppb levels ensures effective contamination control, regulatory compliance, and optimized performance.

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pictograms

FlameCorrosion
GHS02,GHS05

signalword

Danger

supp_hazards

EUH014

存储类别

4.3 - Hazardous materials which set free flammable gases upon contact with water

flash_point_f

-22.0 °F - closed cup

flash_point_c

-30 °C - closed cup

ppe

Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter

Hazard Classifications

Flam. Liq. 2 - Skin Corr. 1B - Water-react. 1

法规信息

危险化学品

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历史批次信息供参考:

分析证书(COA)

Lot/Batch Number
SHBT4988
SHBT1500
SHBS9659
SHBS2053
SHBP1947

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货号GTIN
469858-5G04061838147349
469858-25G04061832359182