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Merck
CN

725501

二(甲基-η5-环戊二烯)二甲基铪

packaged for use in deposition systems

别名:

HFCMME, HfD-CO2

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线性分子式:
Hf[C5H4(CH3)]2(CH3)2
化学文摘社编号:
68193-43-1
分子量:
366.80
UNSPSC Code:
12352300
PubChem Substance ID:
329764165
MDL number:
MFCD16875684

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InChI

1S/2C6H7.2CH3.Hf/c2*1-6-4-2-3-5-6;;;/h2*2-5H,1H3;2*1H3;

SMILES string

C[Hf]C.C[C]1[CH][CH][CH][CH]1.C[C]2[CH][CH][CH][CH]2

InChI key

BSTQZSKPQICLPX-UHFFFAOYSA-N

form

waxy solid

reaction suitability

core: hafnium

color

white

bp

80-120 °C/0.3-0.5 mmHg (lit.)

mp

60 °C (lit.)

density

1.60 g/mL±0.01 g/mL at 25 °C

General description

Atomic number of base material: 72 Hafnium

Application

Precursors Packaged for Depositions Systems

Features and Benefits

Compatible with a variety of oxidants in ALD growth processes across a wide temperature range exhibiting self limiting growth up to 400 °C. Precursor volatility and thermal stability properties enable easy materials transport from bubblers into conventional deposition tools.

Packaging

Packaged in stainless steel cylinders compatible with conventional deposition systems. Precursors may be used in liquid injection systems as dilute solutions and in combination with a variety of other sources to deposit mixed oxides.

pictograms

Exclamation mark
GHS07

signalword

Warning

Hazard Classifications

Eye Irrit. 2 - Skin Irrit. 2 - STOT SE 3

target_organs

Respiratory system

存储类别

13 - Non Combustible Solids

wgk

WGK 3

flash_point_f

Not applicable

flash_point_c

Not applicable

法规信息

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历史批次信息供参考:

分析证书(COA)

Lot/Batch Number
18296JM

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  1. Which document(s) contains shelf-life or expiration date information for a given product?

    If available for a given product, the recommended re-test date or the expiration date can be found on the Certificate of Analysis.

  2. How do I get lot-specific information or a Certificate of Analysis?

    The lot specific COA document can be found by entering the lot number above under the "Documents" section.

  3. How do I find price and availability?

    There are several ways to find pricing and availability for our products. Once you log onto our website, you will find the price and availability displayed on the product detail page. You can contact any of our Customer Sales and Service offices to receive a quote.  USA customers:  1-800-325-3010 or view local office numbers.

  4. What is the Department of Transportation shipping information for this product?

    Transportation information can be found in Section 14 of the product's (M)SDS.To access the shipping information for this material, use the link on the product detail page for the product. 

  5. Can the empty deposition cylinders be refilled?

    Yes, we are able to refill these cylinders through our SAFC Hitech group.  Please contact our Technical Service department by email at techserv@sial.com, and they will forward you to the appropriate SAFC Hitech representative for a quote.

  6. My question is not addressed here, how can I contact Technical Service for assistance?

    Ask a Scientist here.

Atomic Layer Deposition of HfO2 Thin Films Exploiting Novel Cyclopentadienyl Precursors at High Temperatures
J. Niinisto et al.
Chemistry of Materials (2007)
P. R.Chalker
Applied Physics Letters, 93, 182911-182911 (2008)
High-k gate dielectrics: current status and material properties considerations
Wilk, G.D.; Wallace, R.M.; Anthony, J.M.
Journal of Applied Physics, 89, 5243-5243 (2001)
Gutsche, M.; Seidl, H.; Luetzen J.; Birner, A.;
International Electron Devices Meeting, 18-18 (2001)

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