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Merck
CN

760293

2,4,6,8-四甲基环四硅氧烷

packaged for use in deposition systems

别名:

TMCTS

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关于此项目

线性分子式:
(HSiCH3O)4
化学文摘社编号:
分子量:
240.51
UNSPSC Code:
12352103
NACRES:
NA.23
PubChem Substance ID:
EC Number:
219-137-4
Beilstein/REAXYS Number:
1775282
MDL number:
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grade

deposition grade

assay

≥99.5% (GC), ≥99.999% (trace metals analysis)

form

liquid

refractive index

n20/D 1.387 (lit.)

bp

134 °C (lit.)

mp

−69 °C (lit.)

density

0.986 g/mL at 25 °C (lit.)

storage temp.

2-8°C

SMILES string

C[SiH]1O[SiH](C)O[SiH](C)O[SiH](C)O1

InChI

1S/C4H16O4Si4/c1-9-5-10(2)7-12(4)8-11(3)6-9/h9-12H,1-4H3

InChI key

BQYPERTZJDZBIR-UHFFFAOYSA-N

Application

2, 4, 6, 8-Tetramethylcyclotetrasiloxane (TMCTS) is an important precursor for the deposition of polysiloxane, cyclic siloxane, silicon dioxide, oxycarbide thin films with low dielectric constant for microelectronics, semiconductors and other applications

Features and Benefits

薄膜晶体管 (TFT) 栅极电介质的前体,TiO 上光化学形成的 SiOX 单层的组分。


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pictograms

Flame

signalword

Warning

hcodes

Hazard Classifications

Flam. Liq. 3

存储类别

3 - Flammable liquids

wgk

WGK 3

flash_point_f

75.2 °F - closed cup

flash_point_c

24 °C - closed cup

法规信息

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分析证书(COA)

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Ward, L. J.; et al.
Langmuir, 19, 2110-2110 (2003)
Pai, C. S.; et al.
Materials Chemistry and Physics, 44, 1-1 (1996)
Dae-Yoon Kim et al.
Soft matter, 11(1), 58-68 (2014-11-20)
Unconventional star-shaped liquid crystals (abbreviated as SiLCs) were successfully synthesized by chemically connecting four cyanobiphenyl anisotropic mesogens to the periphery of a super-hydrophobic and ultra-flexible cyclic tetramethyltetrasiloxane ring with flexible hexyl chains. Based on the combined experimental techniques of differential



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货号GTIN
760293-25ML04061838141170